Immersion lithography

{
  "id": "MLC-T-CHM-005619",
  "term": "Immersion lithography",
  "field": "Chemistry",
  "definition": "A photolithographic technique that enhances resolution by filling the space between the projection lens and the wafer with a high refractive index liquid, rather than air. This allows for the use of a higher numerical aperture, effectively increasing the resolution limit of the optical system. It is a key technology for manufacturing advanced semiconductor devices with smaller feature sizes.",
  "subject": "Polymer",
  "see_also": [
    "photolithography",
    "immersion fluid",
    "resist"
  ],
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1877 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/immersion-lithography/"
}