Immersion fluid

{
  "id": "MLC-T-CHM-005618",
  "term": "Immersion fluid",
  "field": "Chemistry",
  "definition": "A liquid with a high refractive index that is placed between the projection lens and the resist-coated wafer in immersion lithography. This fluid replaces the air gap, allowing for the use of higher numerical aperture lenses and thus increasing the resolution of the projected image. Water is a commonly used immersion fluid for 193 nm lithography.",
  "subject": "Polymer",
  "see_also": [
    "immersion lithography",
    "photolithography",
    "resist"
  ],
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1876 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/immersion-fluid/"
}