Contact hole

{
  "id": "MLC-T-CHM-002480",
  "term": "Contact hole",
  "field": "Chemistry",
  "definition": "A cylindrical via or opening patterned into a photoresist layer during a lithographic process, designed to allow for electrical connection to an underlying substrate layer. After the resist is developed, the hole exposes a specific area of the substrate for subsequent processing steps like etching or metal deposition. The diameter and aspect ratio of the contact hole are precisely controlled parameters that affect the performance of the final microelectronic device.",
  "subject": "Polymer",
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1869 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/contact-hole/"
}