Patent · US11469132B2 · B2 · US

Method of aligning micro light emitting element and display transferring structure

(11) Publication number

US11469132B2

(21) Application number

17/154,773

(22) Filing date

2021-01-21

(30) Priority date

2020-08-13

(43) Publication date

2022-10-11

(45) Date of grant

2022-10-11

(51) IPC

H01L 21/683; H01L 25/075; H01L 33/20; H01L 33/62

(52) CPC

H10W Generic packages, interconnections, connectors or other constructional details of devices covered by class H10: 90/00
H01L Semiconductor devices; electric solid state devices not otherwise provided for: 21/6835, 2221/68309, 2221/68354, 2221/68368, 25/0753, 2933/0066, 33/20, 33/62
H10H Inorganic light-emitting semiconductor devices having potential barriers: 20/01, 20/0364, 20/819, 20/82, 20/822, 20/857
H10P Generic processes or apparatus for the manufacture or treatment of devices covered by class H10: 72/74, 72/7408, 72/741, 72/7428, 72/7434

(73) Assignee

Samsung Electronics Co Ltd

(72) Inventors

Hyunjoon Kim; KyungWook HWANG

(54) Title

Method of aligning micro light emitting element and display transferring structure

(57) Abstract

A method of aligning micro light emitting elements includes supplying the plurality of micro light emitting elements on a substrate including a plurality of grooves having different shapes, the plurality of micro light emitting elements being configured to be inserted exclusively and respectively into the plurality of grooves; respectively inserting the plurality of micro light emitting elements into the plurality of grooves; and aligning the plurality of micro light emitting elements, wherein at least one groove of the plurality of grooves has a shape that is different from a shape of a respective micro light emitting element inserted into the at least one groove.

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Claims (20)

A method of transferring a plurality of micro light emitting devices, the method comprising: supplying the plurality of micro light emitting devices on a transfer substrate including a plurality of grooves having different shapes, the plurality of micro light emitting devices being configured to be inserted exclusively and respectively into the plurality of grooves; respectively inserting the plurality of micro light emitting devices into the plurality of grooves; and aligning the plurality of micro light emitting devices, wherein at least one groove of the plurality of grooves has a cross-sectional shape that is different from a cross-sectional shape of a respective micro light emitting device inserted into the at least one groove, the cross-sectional shape being a shape of a cross section cut in a direction parallel to a plane of the transfer substrate.
The method of claim 1, wherein the plurality of grooves comprises a first groove having a first cross-sectional shape, a second groove having a second cross-sectional shape that is different from the first cross-sectional shape, and a third groove having a third cross-sectional shape that is different from the first and second cross-sectional shapes, wherein the plurality of micro light emitting devices comprises a first micro light emitting device inserted into the first groove and having a fourth cross-sectional shape, a second micro light emitting device inserted into the second groove and having a fifth cross-sectional shape that is different from the fourth shape, and a third micro light emitting device inserted into the third groove and having a sixth cross-sectional shape that is different from the fourth and fifth cross-sectional shapes, and wherein the second cross-sectional shape of the second groove is different from the fifth cross-sectional shape of the second micro light emitting device.
The method of claim 2, wherein the second micro light emitting device is configured to be inserted into the second groove in a first posture or in a second posture that is different from the first posture, and wherein the second shape of the second groove prevents the first and third micro light emitting devices from being inserted into the second groove.
The method of claim 3, wherein a first region of the second groove into which the second micro light emitting device is inserted in the first posture partially overlaps a second region of the second groove into which the second micro light emitting device is inserted in the second posture.
The method of claim 4, wherein the second micro light emitting device has an aspect ratio in which a horizontal length and a vertical length are different from each other.
The method of claim 5, wherein the second micro light emitting device faces a first direction when inserted in the first posture into the second groove, and wherein the second micro light emitting device faces a second direction different from the first direction when inserted in the second posture into the second groove.
The method of claim 1, wherein each micro light emitting device of the plurality of micro light emitting devices has a shape of a same n-sided polygon and an aspect ratio that is different from aspect ratios of other micro light emitting of the plurality of micro light emitting devices, n being greater than or equal to 3.
The method of claim 2, wherein each of the second micro light emitting device and the third micro light emitting device comprises a body portion and a protrusion portion protruding from the body portion, and wherein the second micro light emitting device and the third micro light emitting device are different from each other in at least one of a shape of the body portion, a shape of the protrusion portion, and a position of the protrusion portion.
The method of claim 1, wherein at least some of the plurality of micro light emitting devices have an aspect ratio of 1:3 or less.
The method of claim 1, wherein the plurality of micro light emitting devices are simultaneously supplied on the transfer substrate.
The method of claim 2, wherein the first micro light emitting device, the second micro light emitting device and third micro light emitting device emit colors different from each other.
A transfer structure comprising: a transfer substrate comprising a plurality of first grooves, a plurality of second grooves, and a plurality of third grooves, wherein each first groove of the plurality of first grooves has a first cross-sectional shape, each second groove of the plurality of second grooves has a second cross-sectional shape that is different from the first shape and each third groove of the plurality of third grooves has a third cross-sectional shape that is different from the first and second cross-sectional shapes; and a plurality of first micro light emitting devices inserted into the plurality of first grooves; a plurality of second micro light emitting devices inserted into the plurality of second grooves; and a plurality of third micro light emitting devices inserted into the plurality of third grooves, wherein each second micro light emitting device of the plurality of second micro light emitting devices has a cross-sectional shape that is different from a-the second cross-sectional shape of each second groove of the plurality of second grooves, the cross-sectional shape being a shape of a cross section cut in a direction parallel to a plane of the transfer substrate.
The transfer structure of claim 12, wherein some second micro light emitting devices of the plurality of second micro light emitting devices inserted into the plurality of second grooves have a first posture, and wherein other second micro light emitting devices of the plurality of second micro light emitting devices have a second posture that is different from the first posture.
The transfer structure of claim 13, wherein a first region of a second groove into which a second micro light emitting device of the plurality of second micro light emitting devices is inserted in the first posture partially overlaps a second region of the second groove into which the second micro light emitting device is inserted in the second posture.
The transfer structure of claim 14, wherein the second micro light emitting device has an aspect ratio in which a horizontal length of the second micro light emitting device and a vertical length of the second micro light emitting device are different from each other.
The transfer structure of claim 15, wherein the second micro light emitting device faces a first direction when inserted in the first posture into the second groove, and wherein the second micro light emitting device faces a second direction different from the first direction when inserted in the second posture into the second groove.
The transfer structure of claim 12, wherein each of the plurality of first micro light emitting devices, each of the plurality of second micro light emitting devices, and each of the plurality of third micro light emitting devices has a shape of a same n-sided polygon, n being greater than or equal to 3, wherein each first micro light emitting device of the plurality of first micro light emitting devices has a first aspect ratio, each second micro light emitting device of the plurality of second micro light emitting devices has a second aspect ratio that is different from the first aspect ratio, and each third micro light emitting device of the plurality of third micro light emitting devices has a third aspect ratio that is different from the first and second aspect ratios.
The transfer structure of claim 12, wherein each second micro light emitting device of the plurality of second micro light emitting devices and each third micro light emitting device of the plurality of third micro light emitting devices includes a body portion and a protrusion portion protruding from the body portion, and wherein the plurality of second micro light emitting devices are different from the plurality of third micro light emitting devices in at least one of a shape of the body portion, a shape of the protrusion portion, and a position of the protrusion portion.
The transfer structure of claim 12, wherein at least some of the plurality of first micro light emitting devices, the plurality of second micro light emitting devices, and the plurality of third micro light emitting devices have an aspect ratio of 1:3 or less.
The transfer structure of claim 12, wherein the first micro light emitting device, the second micro light emitting device and third micro light emitting device emit colors different from each other.

Description

Example embodiments relate to a method of aligning micro light emitting elements and a display transferring structure.

Light emitting diodes (LEDs) have advantages of being eco-friendly and providing low power consumption. Due to these advantages, industrial demand for LEDs is increasing. LEDs have been applied y to lighting devices or LCD backlights, as well as LED display devices. That is, display devices using micro-unit LED chips have been developed.

In manufacturing a micro LED display device, micro LEDs need to be transferred onto a substrate. A pick and place method is widely used as a method of transferring micro LEDs. However, in this method, productivity is low because the micro LEDs have small sizes and a display has a large size.

Provided is a method of aligning micro light emitting elements.

Provided is a display transferring structure in which micro light emitting elements are aligned.

Additional aspects will be set forth in part in the description which follows and, in part, will be apparent from the description, or may be learned by practice of the presented embodiments of the disclosure.

Citations (14)

US6864570B2
US20010031514A1
JP4352473B2
US7033854B2
JP3829594B2
US6599769B2
JP4082031B2
US9825202B2
US20190006564A1
US10516084B2
KR20190111151A
KR102042178B1
US20210151633A1
US20210233795A1

Record as JSON

{
  "publication_number": "US11469132B2",
  "country": "US",
  "kind": "B2",
  "title": "Method of aligning micro light emitting element and display transferring structure",
  "abstract": "A method of aligning micro light emitting elements includes supplying the plurality of micro light emitting elements on a substrate including a plurality of grooves having different shapes, the plurality of micro light emitting elements being configured to be inserted exclusively and respectively into the plurality of grooves; respectively inserting the plurality of micro light emitting elements into the plurality of grooves; and aligning the plurality of micro light emitting elements, wherein at least one groove of the plurality of grooves has a shape that is different from a shape of a respective micro light emitting element inserted into the at least one groove.",
  "claims": [
    "1. A method of transferring a plurality of micro light emitting devices, the method comprising: supplying the plurality of micro light emitting devices on a transfer substrate including a plurality of grooves having different shapes, the plurality of micro light emitting devices being configured to be inserted exclusively and respectively into the plurality of grooves; respectively inserting the plurality of micro light emitting devices into the plurality of grooves; and aligning the plurality of micro light emitting devices, wherein at least one groove of the plurality of grooves has a cross-sectional shape that is different from a cross-sectional shape of a respective micro light emitting device inserted into the at least one groove, the cross-sectional shape being a shape of a cross section cut in a direction parallel to a plane of the transfer substrate.",
    "2. The method of claim 1, wherein the plurality of grooves comprises a first groove having a first cross-sectional shape, a second groove having a second cross-sectional shape that is different from the first cross-sectional shape, and a third groove having a third cross-sectional shape that is different from the first and second cross-sectional shapes, wherein the plurality of micro light emitting devices comprises a first micro light emitting device inserted into the first groove and having a fourth cross-sectional shape, a second micro light emitting device inserted into the second groove and having a fifth cross-sectional shape that is different from the fourth shape, and a third micro light emitting device inserted into the third groove and having a sixth cross-sectional shape that is different from the fourth and fifth cross-sectional shapes, and wherein the second cross-sectional shape of the second groove is different from the fifth cross-sectional shape of the second micro light emitting device.",
    "3. The method of claim 2, wherein the second micro light emitting device is configured to be inserted into the second groove in a first posture or in a second posture that is different from the first posture, and wherein the second shape of the second groove prevents the first and third micro light emitting devices from being inserted into the second groove.",
    "4. The method of claim 3, wherein a first region of the second groove into which the second micro light emitting device is inserted in the first posture partially overlaps a second region of the second groove into which the second micro light emitting device is inserted in the second posture.",
    "5. The method of claim 4, wherein the second micro light emitting device has an aspect ratio in which a horizontal length and a vertical length are different from each other.",
    "6. The method of claim 5, wherein the second micro light emitting device faces a first direction when inserted in the first posture into the second groove, and wherein the second micro light emitting device faces a second direction different from the first direction when inserted in the second posture into the second groove.",
    "7. The method of claim 1, wherein each micro light emitting device of the plurality of micro light emitting devices has a shape of a same n-sided polygon and an aspect ratio that is different from aspect ratios of other micro light emitting of the plurality of micro light emitting devices, n being greater than or equal to 3.",
    "8. The method of claim 2, wherein each of the second micro light emitting device and the third micro light emitting device comprises a body portion and a protrusion portion protruding from the body portion, and wherein the second micro light emitting device and the third micro light emitting device are different from each other in at least one of a shape of the body portion, a shape of the protrusion portion, and a position of the protrusion portion.",
    "9. The method of claim 1, wherein at least some of the plurality of micro light emitting devices have an aspect ratio of 1:3 or less.",
    "10. The method of claim 1, wherein the plurality of micro light emitting devices are simultaneously supplied on the transfer substrate.",
    "11. The method of claim 2, wherein the first micro light emitting device, the second micro light emitting device and third micro light emitting device emit colors different from each other.",
    "12. A transfer structure comprising: a transfer substrate comprising a plurality of first grooves, a plurality of second grooves, and a plurality of third grooves, wherein each first groove of the plurality of first grooves has a first cross-sectional shape, each second groove of the plurality of second grooves has a second cross-sectional shape that is different from the first shape and each third groove of the plurality of third grooves has a third cross-sectional shape that is different from the first and second cross-sectional shapes; and a plurality of first micro light emitting devices inserted into the plurality of first grooves; a plurality of second micro light emitting devices inserted into the plurality of second grooves; and a plurality of third micro light emitting devices inserted into the plurality of third grooves, wherein each second micro light emitting device of the plurality of second micro light emitting devices has a cross-sectional shape that is different from a-the second cross-sectional shape of each second groove of the plurality of second grooves, the cross-sectional shape being a shape of a cross section cut in a direction parallel to a plane of the transfer substrate.",
    "13. The transfer structure of claim 12, wherein some second micro light emitting devices of the plurality of second micro light emitting devices inserted into the plurality of second grooves have a first posture, and wherein other second micro light emitting devices of the plurality of second micro light emitting devices have a second posture that is different from the first posture.",
    "14. The transfer structure of claim 13, wherein a first region of a second groove into which a second micro light emitting device of the plurality of second micro light emitting devices is inserted in the first posture partially overlaps a second region of the second groove into which the second micro light emitting device is inserted in the second posture.",
    "15. The transfer structure of claim 14, wherein the second micro light emitting device has an aspect ratio in which a horizontal length of the second micro light emitting device and a vertical length of the second micro light emitting device are different from each other.",
    "16. The transfer structure of claim 15, wherein the second micro light emitting device faces a first direction when inserted in the first posture into the second groove, and wherein the second micro light emitting device faces a second direction different from the first direction when inserted in the second posture into the second groove.",
    "17. The transfer structure of claim 12, wherein each of the plurality of first micro light emitting devices, each of the plurality of second micro light emitting devices, and each of the plurality of third micro light emitting devices has a shape of a same n-sided polygon, n being greater than or equal to 3, wherein each first micro light emitting device of the plurality of first micro light emitting devices has a first aspect ratio, each second micro light emitting device of the plurality of second micro light emitting devices has a second aspect ratio that is different from the first aspect ratio, and each third micro light emitting device of the plurality of third micro light emitting devices has a third aspect ratio that is different from the first and second aspect ratios.",
    "18. The transfer structure of claim 12, wherein each second micro light emitting device of the plurality of second micro light emitting devices and each third micro light emitting device of the plurality of third micro light emitting devices includes a body portion and a protrusion portion protruding from the body portion, and wherein the plurality of second micro light emitting devices are different from the plurality of third micro light emitting devices in at least one of a shape of the body portion, a shape of the protrusion portion, and a position of the protrusion portion.",
    "19. The transfer structure of claim 12, wherein at least some of the plurality of first micro light emitting devices, the plurality of second micro light emitting devices, and the plurality of third micro light emitting devices have an aspect ratio of 1:3 or less.",
    "20. The transfer structure of claim 12, wherein the first micro light emitting device, the second micro light emitting device and third micro light emitting device emit colors different from each other."
  ],
  "description_excerpt": "Example embodiments relate to a method of aligning micro light emitting elements and a display transferring structure.\n\nLight emitting diodes (LEDs) have advantages of being eco-friendly and providing low power consumption. Due to these advantages, industrial demand for LEDs is increasing. LEDs have been applied y to lighting devices or LCD backlights, as well as LED display devices. That is, display devices using micro-unit LED chips have been developed.\n\nIn manufacturing a micro LED display device, micro LEDs need to be transferred onto a substrate. A pick and place method is widely used as a method of transferring micro LEDs. However, in this method, productivity is low because the micro LEDs have small sizes and a display has a large size.\n\nProvided is a method of aligning micro light emitting elements.\n\nProvided is a display transferring structure in which micro light emitting elements are aligned.\n\nAdditional aspects will be set forth in part in the description which follows and, in part, will be apparent from the description, or may be learned by practice of the presented embodiments of the disclosure.",
  "cpc": [
    "H10W 90/00",
    "H01L 21/6835",
    "H01L 2221/68309",
    "H01L 2221/68354",
    "H01L 2221/68368",
    "H01L 25/0753",
    "H01L 2933/0066",
    "H01L 33/20",
    "H01L 33/62",
    "H10H 20/01",
    "H10H 20/0364",
    "H10H 20/819",
    "H10H 20/82",
    "H10H 20/822",
    "H10H 20/857",
    "H10P 72/74",
    "H10P 72/7408",
    "H10P 72/741",
    "H10P 72/7428",
    "H10P 72/7434"
  ],
  "ipc": [
    "H01L 21/683",
    "H01L 25/075",
    "H01L 33/20",
    "H01L 33/62"
  ],
  "assignees": [
    "Samsung Electronics Co Ltd"
  ],
  "inventors": [
    "Hyunjoon Kim",
    "KyungWook HWANG"
  ],
  "filing_date": "2021-01-21",
  "publication_date": "2022-10-11",
  "grant_date": "2022-10-11",
  "priority_date": "2020-08-13",
  "application_number": "US-202117154773-A",
  "family_id": "80223044",
  "cited_by_count": 8,
  "citations": [
    "US6864570B2",
    "US20010031514A1",
    "JP4352473B2",
    "US7033854B2",
    "JP3829594B2",
    "US6599769B2",
    "JP4082031B2",
    "US9825202B2",
    "US20190006564A1",
    "US10516084B2",
    "KR20190111151A",
    "KR102042178B1",
    "US20210151633A1",
    "US20210233795A1"
  ]
}

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