Defect-free pattern

{
  "id": "MLC-T-CHM-002915",
  "term": "Defect-free pattern",
  "field": "Chemistry",
  "definition": "A lithographically produced polymer pattern that perfectly replicates the intended design without any imperfections or deviations. Achieving such a pattern is a primary goal in microfabrication, as defects can compromise the functionality of devices. This requires precise control over all stages of the lithographic process.",
  "subject": "Polymer",
  "see_also": [
    "resist"
  ],
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1870 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/defect-free-pattern/"
}