Implanted areic dose

{
  "id": "MLC-T-CHM-005731",
  "term": "Implanted areic dose",
  "field": "Chemistry",
  "definition": "The total number of atoms of a specific element implanted into a solid material per unit of surface area during an ion implantation process. This quantity measures the concentration of the implanted species within the near-surface region of the target material. Implanted areic dose is a primary parameter controlling the modification of material properties and is expressed in units of atoms per square meter (atoms m⁻²).",
  "subject": "Analytical Chemistry",
  "references": [
    "PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1805 (https://doi.org/10.1515/pac-2019-0404)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/implanted-areic-dose/"
}