Ion implantation

{
  "id": "MLC-T-CHM-006084",
  "term": "Ion implantation",
  "field": "Chemistry",
  "definition": "A process in which ions are accelerated in an electric field and directed into a solid material, altering its physical, chemical, or electrical properties. The implanted ions become embedded within the target material, changing its composition and structure. This technique is used in semiconductor manufacturing and material science.",
  "subject": "Analytical Chemistry",
  "references": [
    "PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1806 (https://doi.org/10.1515/pac-2019-0404)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/ion-implantation/"
}