Instrumental depth resolution

{
  "id": "MLC-T-CHM-005908",
  "term": "Instrumental depth resolution",
  "field": "Chemistry",
  "definition": "The minimum difference in depth that an analytical instrument can distinguish between two features within a sample. This parameter quantifies the ability of a surface analysis technique to resolve variations in composition or structure as a function of depth. It is typically measured in nanometers or angstroms.",
  "subject": "Analytical Chemistry",
  "see_also": [
    "Auger spectroscopy",
    "depth resolution parameter",
    "depth profiling",
    "secondary-ion mass spectrometry"
  ],
  "references": [
    "PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1806 (https://doi.org/10.1515/pac-2019-0404)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/instrumental-depth-resolution/"
}