Depth resolution

{
  "id": "MLC-T-CHM-003040",
  "term": "Depth resolution",
  "field": "Chemistry",
  "definition": "The ability of a surface analysis technique to distinguish between two closely spaced layers or features at different depths within a material. It quantifies the sharpness of an interface observed in a depth profile. A smaller depth resolution value indicates a better ability to resolve fine structural details in the depth dimension.",
  "subject": "Analytical Chemistry",
  "see_also": [
    "depth profile",
    "interface"
  ],
  "references": [
    "PAC, 1979, 51, 2243. 'General aspects of trace analytical methods - IV. Recommendations for nomenclature, standard procedures and reporting of experimental data for surface analysis techniques' on page 2247 (https://doi.org/10.1351/pac197951112243)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/depth-resolution/"
}