Lateral resolution

{
  "id": "MLC-T-CHM-006478",
  "term": "Lateral resolution",
  "field": "Chemistry",
  "definition": "The minimum distance between two points on a sample's surface that an analytical instrument can distinguish as separate entities. In surface analysis techniques like scanning electron microscopy or Auger electron spectroscopy, it defines the ability to discern fine surface features. The achievable lateral resolution is determined by factors including the probe beam diameter and the volume of interaction between the probe and the sample.",
  "subject": "Analytical Chemistry",
  "see_also": [
    "Auger electron",
    "back scattered electrons",
    "beam diameter",
    "diffusion",
    "primary electrons",
    "qualitative analysis",
    "quantitative analysis",
    "secondary electrons"
  ],
  "references": [
    "PAC, 1983, 55, 2023. 'Nomenclature, symbols and units recommended for in situ microanalysis (Provisional)' on page 2027 (https://doi.org/10.1351/pac198355122023)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/lateral-resolution/"
}