Ultra-shallow depth profile

{
  "id": "MLC-T-CHM-012398",
  "term": "Ultra-shallow depth profile",
  "field": "Chemistry",
  "definition": "A measurement of the elemental or molecular composition as a function of depth, extending only a few nanometers into the surface of a material. This technique provides high spatial resolution in the z-direction, revealing compositional changes near the outermost atomic layers. Such profiles are often obtained using techniques like low-energy secondary-ion mass spectrometry (SIMS).",
  "subject": "Analytical Chemistry",
  "see_also": [
    "secondary-ion mass spectrometry"
  ],
  "references": [
    "PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1846 (https://doi.org/10.1515/pac-2019-0404)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/ultra-shallow-depth-profile/"
}