Rutherford backscattering spectrometry

{
  "id": "MLC-T-CHM-010459",
  "term": "Rutherford backscattering spectrometry",
  "field": "Chemistry",
  "definition": "An analytical technique that uses the elastic scattering of high-energy ions, typically helium ions, from a sample to determine its elemental composition and depth profile. The energy of the backscattered ions is directly related to the mass of the target atoms and their depth within the sample. This method is widely used for thin film analysis and materials characterization.",
  "subject": "Analytical Chemistry",
  "see_also": [
    "Rutherford cross section",
    "probe ion"
  ],
  "references": [
    "PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1785 (https://doi.org/10.1515/pac-2019-0404)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/rutherford-backscattering-spectrometry/"
}