Rutherford backscattering

{
  "id": "MLC-T-CHM-010458",
  "term": "Rutherford backscattering",
  "field": "Chemistry",
  "definition": "A surface analysis technique that involves directing a beam of high-energy ions, typically helium ions, at a sample surface and detecting the ions that are backscattered. The energy and yield of the backscattered ions provide information about the elemental composition, depth profile, and thickness of thin films. This method is non-destructive and quantitative for heavy elements on lighter substrates.",
  "synonyms": [
    "backscattering spectroscopy",
    "backscattering spectrometry (BSS)"
  ],
  "subject": "Analytical Chemistry",
  "see_also": [
    "angle",
    "spectroscopy"
  ],
  "references": [
    "PAC, 1979, 51, 2243. 'General aspects of trace analytical methods - IV. Recommendations for nomenclature, standard procedures and reporting of experimental data for surface analysis techniques' on page 2246 (https://doi.org/10.1351/pac197951112243)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/rutherford-backscattering/"
}