Backscattering correction factor

{
  "id": "MLC-T-CHM-001084",
  "term": "Backscattering correction factor",
  "field": "Chemistry",
  "definition": "A numerical factor applied in quantitative surface analysis techniques, such as Auger electron spectroscopy, to account for the contribution of backscattered electrons to the measured signal. This factor adjusts for the increased ionization events caused by primary electrons that have been scattered back towards the surface. It depends on the atomic number of the sample and the energy of the incident electrons.",
  "subject": "Analytical Chemistry",
  "see_also": [
    "Auger spectroscopy",
    "backscattered electron"
  ],
  "references": [
    "PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1821 (https://doi.org/10.1515/pac-2019-0404)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/backscattering-correction-factor/"
}