Secondary-ion mass spectrometry

{
  "id": "MLC-T-CHM-010639",
  "term": "Secondary-ion mass spectrometry",
  "field": "Chemistry",
  "definition": "A surface-sensitive analytical technique that uses a focused primary ion beam to sputter material from a sample surface, generating secondary ions that are then mass analyzed. This method provides elemental, isotopic, and molecular information about the surface and subsurface regions. It can achieve very high spatial resolution, down to tens of nanometers.",
  "subject": "Analytical Chemistry",
  "see_also": [
    "dynamic secondary-ion mass spectrometry",
    "static secondary-ion mass spectrometry"
  ],
  "references": [
    "PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1789 (https://doi.org/10.1515/pac-2019-0404)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/secondary-ion-mass-spectrometry/"
}