Secondary-ion energy distribution

{
  "id": "MLC-T-CHM-010638",
  "term": "Secondary-ion energy distribution",
  "field": "Chemistry",
  "definition": "The distribution of kinetic energies of secondary ions ejected from a surface during sputtering by primary ion bombardment. This distribution provides insights into the sputtering process and the binding energies of atoms on the surface. It is typically characterized by a peak at low energies, followed by a decrease at higher energies, and is measured using an energy analyzer.",
  "subject": "Analytical Chemistry",
  "see_also": [
    "secondary ion"
  ],
  "references": [
    "PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1844 (https://doi.org/10.1515/pac-2019-0404)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/secondary-ion-energy-distribution/"
}