Secondary-ion angular distribution

{
  "id": "MLC-T-CHM-010637",
  "term": "Secondary-ion angular distribution",
  "field": "Chemistry",
  "definition": "The spatial distribution of secondary ions ejected from a surface during sputtering, describing the angles at which these ions are emitted relative to the surface normal. This distribution provides information about the surface structure and the mechanisms of ion emission. It is measured by specialized detectors that can resolve the emission angles of the sputtered ions.",
  "subject": "Analytical Chemistry",
  "references": [
    "PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1844 (https://doi.org/10.1515/pac-2019-0404)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/secondary-ion-angular-distribution/"
}