Ion probe microanalysis

{
  "id": "MLC-T-CHM-006092",
  "term": "Ion probe microanalysis",
  "field": "Chemistry",
  "definition": "A surface analysis technique that uses a focused beam of primary ions to sputter material from a solid sample, which is then analyzed by mass spectrometry. This method provides elemental and isotopic information with high spatial resolution. It is particularly effective for depth profiling and imaging of elemental distributions within a sample.",
  "subject": "Analytical Chemistry",
  "see_also": [
    "mass spectrometer"
  ],
  "references": [
    "PAC, 1979, 51, 2243. 'General aspects of trace analytical methods - IV. Recommendations for nomenclature, standard procedures and reporting of experimental data for surface analysis techniques' on page 2246 (https://doi.org/10.1351/pac197951112243)",
    "PAC, 1983, 55, 2023. 'Nomenclature, symbols and units recommended for in situ microanalysis (Provisional)' on page 2025 (https://doi.org/10.1351/pac198355122023)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/ion-probe-microanalysis/"
}