Electron probe microanalysis

{
  "id": "MLC-T-CHM-003733",
  "term": "Electron probe microanalysis",
  "field": "Chemistry",
  "definition": "A non-destructive analytical technique that uses a focused beam of high-energy electrons to bombard a sample, causing the emission of characteristic X-rays. These X-rays are then detected and analyzed to determine the elemental composition of the sample at a microscopic level. The technique provides quantitative elemental analysis with spatial resolution typically in the micrometer range.",
  "subject": "Analytical Chemistry",
  "references": [
    "PAC, 1983, 55, 2023. 'Nomenclature, symbols and units recommended for in situ microanalysis (Provisional)' on page 2024 (https://doi.org/10.1351/pac198355122023)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/electron-probe-microanalysis/"
}