Electron probe X-ray microanalysis

{
  "id": "MLC-T-CHM-003734",
  "term": "Electron probe X-ray microanalysis",
  "field": "Chemistry",
  "definition": "A method for determining the elemental composition of a small volume of material by bombarding it with a focused beam of electrons and analyzing the emitted characteristic X-rays. This technique allows for quantitative analysis of elements from boron to uranium. It is often performed using an electron microprobe instrument.",
  "subject": "Analytical Chemistry",
  "see_also": [
    "absorbed electrons",
    "back scattered electrons",
    "secondary electrons"
  ],
  "references": [
    "PAC, 1983, 55, 2023. 'Nomenclature, symbols and units recommended for in situ microanalysis (Provisional)' on page 2024 (https://doi.org/10.1351/pac198355122023)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/electron-probe-x-ray-microanalysis/"
}