Ion microscopy

{
  "id": "MLC-T-CHM-006087",
  "term": "Ion microscopy",
  "field": "Chemistry",
  "definition": "A surface analysis technique that uses a focused beam of primary ions to sputter material from a sample surface. The secondary ions produced are then analyzed by mass spectrometry to create elemental or isotopic images of the surface. This method provides high spatial resolution, typically in the micrometer to sub-micrometer range.",
  "subject": "Analytical Chemistry",
  "see_also": [
    "mass spectrometry"
  ],
  "references": [
    "Orange Book, 2nd ed., p. 249 (https://media.iupac.org/publications/analytical_compendium/)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/ion-microscopy/"
}