Focused ion beam system

{
  "id": "MLC-T-CHM-004557",
  "term": "Focused ion beam system",
  "field": "Chemistry",
  "definition": "An instrument that uses a finely focused beam of ions, usually gallium, to image, mill, or deposit material on a sample surface with high precision. The energetic ions sputter atoms from the target, allowing for micro-machining, cross-sectioning for subsurface imaging, and sample preparation for transmission electron microscopy. When combined with a scanning electron microscope, the instrument is called a dual-beam system.",
  "subject": "Analytical Chemistry",
  "see_also": [
    "Auger spectroscopy",
    "ion beam",
    "secondary-ion mass spectrometry"
  ],
  "references": [
    "PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1805 (https://doi.org/10.1515/pac-2019-0404)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/focused-ion-beam-system/"
}