Focused ion beam

{
  "id": "MLC-T-CHM-004556",
  "term": "Focused ion beam",
  "field": "Chemistry",
  "definition": "A technique that uses a finely focused beam of ions, typically gallium ions, to mill, deposit, or image materials at the nanoscale. The high kinetic energy of the ions allows for precise material removal or modification. This method is employed in semiconductor manufacturing for circuit editing and in materials science for cross-sectional analysis and sample preparation for transmission electron microscopy.",
  "subject": "Polymer",
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1875 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/focused-ion-beam/"
}