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Radiofrequency glow discharge optical emission spectroscopy

Term · Chemistry · MLC-T-CHM-009885

A spectroscopic technique that uses a radiofrequency glow discharge as an atomization and excitation source for optical emission spectrometry. The sample is introduced into a low-pressure plasma, where atoms are excited and emit characteristic light. This method is applied to the elemental analysis of solid samples, particularly for depth profiling and surface analysis.

Table 1. Record
IdentifierMLC-T-CHM-009885
FieldChemistry
SubjectAnalytical Chemistry
ReferencesPAC, 2021, 93, 647. 'Glossary of methods and terms used in analytical spectroscopy (IUPAC Recommendations 2019)' on page 731 (https://doi.org/10.1515/pac-2019-0203)
See alsoOptical emission spectroscopy; Glow discharge source
Record as JSON
{
  "id": "MLC-T-CHM-009885",
  "term": "Radiofrequency glow discharge optical emission spectroscopy",
  "field": "Chemistry",
  "definition": "A spectroscopic technique that uses a radiofrequency glow discharge as an atomization and excitation source for optical emission spectrometry. The sample is introduced into a low-pressure plasma, where atoms are excited and emit characteristic light. This method is applied to the elemental analysis of solid samples, particularly for depth profiling and surface analysis.",
  "subject": "Analytical Chemistry",
  "see_also": [
    "optical emission spectroscopy",
    "glow discharge source"
  ],
  "references": [
    "PAC, 2021, 93, 647. 'Glossary of methods and terms used in analytical spectroscopy (IUPAC Recommendations 2019)' on page 731 (https://doi.org/10.1515/pac-2019-0203)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/radiofrequency-glow-discharge-optical-emission-spectroscopy/"
}

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