Relative sputtering rate

{
  "id": "MLC-T-CHM-010162",
  "term": "Relative sputtering rate",
  "field": "Chemistry",
  "definition": "A dimensionless comparison of erosion speeds: how quickly an ion beam removes material from a sample, divided by how quickly it removes material from a chosen reference sample under identical conditions. Values above 1 mean the sample erodes faster than the reference. It is used, for example, to convert sputter time into approximate depth when a layer is not made of the reference material.",
  "subject": "Analytical Chemistry",
  "see_also": [
    "sputtering rate"
  ],
  "references": [
    "PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1811 (https://doi.org/10.1515/pac-2019-0404)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/relative-sputtering-rate/"
}