MLchartDataset catalogue

i-line

Term · Semiconductors · MLC-T-SEM-000167

A specific spectral line from a mercury arc lamp, with a wavelength of 365 nanometers, historically used as the illumination source in photolithography. While largely superseded by DUV and EUV for advanced nodes, i-line lithography remains relevant for less demanding applications and older technology generations. It offers a balance of resolution and cost-effectiveness for certain semiconductor device manufacturing.

Table 1. Record
IdentifierMLC-T-SEM-000167
FieldSemiconductors
SubjectLithography & Patterning
Record as JSON 
{
  "id": "MLC-T-SEM-000167",
  "term": "i-line",
  "field": "Semiconductors",
  "definition": "A specific spectral line from a mercury arc lamp, with a wavelength of 365 nanometers, historically used as the illumination source in photolithography. While largely superseded by DUV and EUV for advanced nodes, i-line lithography remains relevant for less demanding applications and older technology generations. It offers a balance of resolution and cost-effectiveness for certain semiconductor device manufacturing.",
  "subject": "Lithography & Patterning",
  "url": "https://mlchart.com/terminology/semiconductors/i-line/"
}

Record 168 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.