Pattern collapse

{
  "id": "MLC-T-CHM-008547",
  "term": "Pattern collapse",
  "field": "Chemistry",
  "definition": "The mechanical failure of high-aspect-ratio polymer structures during or after the development process in lithography. This phenomenon occurs when capillary forces or other stresses exceed the mechanical strength of the polymer features, causing them to bend, fall over, or adhere to adjacent structures. It is a major challenge in fabricating nanoscale devices, particularly with feature sizes below 50 nanometers.",
  "subject": "Polymer",
  "see_also": [
    "development"
  ],
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1882 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/pattern-collapse/"
}