Soft lithography

{
  "id": "MLC-T-CHM-010970",
  "term": "Soft lithography",
  "field": "Chemistry",
  "definition": "A family of microfabrication techniques that use elastomeric stamps, molds, or masks to pattern surfaces. These methods rely on conformal contact, self-assembly, and replica molding to create micro- and nanoscale features. Polydimethylsiloxane (PDMS) is a commonly used material for the elastomeric components due to its flexibility and chemical inertness.",
  "subject": "Polymer",
  "see_also": [
    "mask"
  ],
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1878 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/soft-lithography/"
}