Pitch division

{
  "id": "MLC-T-CHM-008983",
  "term": "Pitch division",
  "field": "Chemistry",
  "definition": "A method of making a lithographic pattern with a smaller pitch than a single exposure can resolve at the imaging wavelength, for example by depositing spacers on a first pattern or by multiplying lines with directed self-assembly of a block copolymer. Doubling the feature density halves the pitch, and repeating the process gives quadruple patterning.",
  "subject": "Polymer",
  "see_also": [
    "directed self-assembly",
    "lithography"
  ],
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1884 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/pitch-division/"
}