MLchartDataset catalogue

Directed self-assembly

Term · Chemistry · MLC-T-CHM-003265

A process where block copolymers or other self-assembling materials are guided by an external template to form ordered nanoscale patterns. The template provides a pre-pattern that directs the orientation and registration of the self-assembled structures. This technique is explored for creating high-resolution patterns in semiconductor manufacturing, exceeding the limits of conventional lithography.

Table 1. Record
IdentifierMLC-T-CHM-003265
FieldChemistry
SubjectPolymer
SynonymsDSA
ReferencesPAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1871 (https://doi.org/10.1515/pac-2018-1215)
See alsoNanopattern
Record as JSON
{
  "id": "MLC-T-CHM-003265",
  "term": "Directed self-assembly",
  "field": "Chemistry",
  "definition": "A process where block copolymers or other self-assembling materials are guided by an external template to form ordered nanoscale patterns. The template provides a pre-pattern that directs the orientation and registration of the self-assembled structures. This technique is explored for creating high-resolution patterns in semiconductor manufacturing, exceeding the limits of conventional lithography.",
  "synonyms": [
    "DSA"
  ],
  "subject": "Polymer",
  "see_also": [
    "nanopattern"
  ],
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1871 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/directed-self-assembly/"
}

Record 3,473 of 13,676 in Chemistry terminology (MLC-0109). Request the full dataset.