Directed self-assembly
Term · Chemistry · MLC-T-CHM-003265
A process where block copolymers or other self-assembling materials are guided by an external template to form ordered nanoscale patterns. The template provides a pre-pattern that directs the orientation and registration of the self-assembled structures. This technique is explored for creating high-resolution patterns in semiconductor manufacturing, exceeding the limits of conventional lithography.
| Identifier | MLC-T-CHM-003265 |
|---|---|
| Field | Chemistry |
| Subject | Polymer |
| Synonyms | DSA |
| References | PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1871 (https://doi.org/10.1515/pac-2018-1215) |
| See also | Nanopattern |
Record as JSON
{
"id": "MLC-T-CHM-003265",
"term": "Directed self-assembly",
"field": "Chemistry",
"definition": "A process where block copolymers or other self-assembling materials are guided by an external template to form ordered nanoscale patterns. The template provides a pre-pattern that directs the orientation and registration of the self-assembled structures. This technique is explored for creating high-resolution patterns in semiconductor manufacturing, exceeding the limits of conventional lithography.",
"synonyms": [
"DSA"
],
"subject": "Polymer",
"see_also": [
"nanopattern"
],
"references": [
"PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1871 (https://doi.org/10.1515/pac-2018-1215)"
],
"url": "https://mlchart.com/terminology/chemistry/directed-self-assembly/"
}
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