Redeposition

{
  "id": "MLC-T-CHM-010037",
  "term": "Redeposition",
  "field": "Chemistry",
  "definition": "The process where material that has been removed from a surface, typically by sputtering or etching, subsequently settles back onto another part of the same surface or a different surface. This can lead to contamination or the formation of unwanted layers. It is a common phenomenon in vacuum processing and surface analysis techniques.",
  "subject": "Analytical Chemistry",
  "references": [
    "PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1811 (https://doi.org/10.1515/pac-2019-0404)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/redeposition/"
}