Vector scan

{
  "id": "MLC-T-CHM-012534",
  "term": "Vector scan",
  "field": "Chemistry",
  "definition": "A method of pattern generation in lithography where an electron or laser beam is directed to draw the desired pattern by moving along specific vectors or lines. The beam only exposes the areas that form the pattern, rather than scanning the entire surface. This technique offers high resolution and efficiency for creating intricate designs in polymer resists.",
  "subject": "Polymer",
  "see_also": [
    "raster scan"
  ],
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1890 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/vector-scan/"
}