MLchartDataset catalogue

Wafer bow

Term · Semiconductors · MLC-T-SEM-000349

A measure of the overall concave or convex curvature of a semiconductor wafer, typically caused by internal stresses induced during manufacturing processes. It is defined as the deviation of the median surface of the wafer from a perfect plane. Wafer bow is measured in micrometers and can affect subsequent processing steps such as lithography and thin film deposition.

Table 1. Record
IdentifierMLC-T-SEM-000349
FieldSemiconductors
SubjectMaterials & Wafers
Record as JSON 
{
  "id": "MLC-T-SEM-000349",
  "term": "Wafer bow",
  "field": "Semiconductors",
  "definition": "A measure of the overall concave or convex curvature of a semiconductor wafer, typically caused by internal stresses induced during manufacturing processes. It is defined as the deviation of the median surface of the wafer from a perfect plane. Wafer bow is measured in micrometers and can affect subsequent processing steps such as lithography and thin film deposition.",
  "subject": "Materials & Wafers",
  "url": "https://mlchart.com/terminology/semiconductors/wafer-bow/"
}

Record 369 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.