Integration of semiconductor epilayers on non-native substrates

{
  "publication_number": "US9577047B2",
  "country": "US",
  "kind": "B2",
  "title": "Integration of semiconductor epilayers on non-native substrates",
  "abstract": "An article includes a support substrate bonded to heterostructure epitaxial layers that include one or more electronic devices. The support substrate has a bonding surface and the heterostructure epitaxial layers have a surface with the epitaxial growth direction of the heterostructure epitaxial layers towards the surface. The surface of the heterostructure epitaxial layers is bonded at the bonding surface of the support substrate by ion exchange between the surface of the heterostructure epitaxial layers and the bonding surface of the support substrate.",
  "claims": [
    "1. An article, comprising: a support substrate having bonding surface; and heterostructure epitaxial layers that include one or more electronic devices, the heterostructure epitaxial layers having a surface and an epitaxial growth direction towards the surface, the heterostructure epitaxial layers bonded to the support substrate at the surface of the heterostructure epitaxial layers by ion exchange between the surface of the heterostructure epitaxial layers and the bonding surface of the support substrate, wherein the support substrate and the heterostructure epitaxial layers are configured to powderize together in response to a trigger.",
    "2. The article of claim 1, wherein the heterostructure epitaxial layers are less than 10 μm thick.",
    "3. The article of claim 1, wherein the electronic devices comprise one or more of a laser diode, a light-emitting diode, a diode, a transistor, a photodetector, a light guide, a semiconductor optical amplifier, an electronic switch, a field-effect device, and a modulator.",
    "4. The article of claim 1, wherein the electronic devices comprise one or more of GaAs, InP, Si, and GaN-based electronic devices.",
    "5. The article of claim 1, wherein the support substrate is chemically tempered glass.",
    "6. The article of claim 1, wherein a growth substrate used to grow the heterostructure epitaxial layers is absent from the article.",
    "7. The article of claim 1, further comprising an electrically conductive intermediate layer having a thickness less than about 1 μm is disposed between the surface of the heterostructure epitaxial layers and the bonding surface of the support substrate.",
    "8. The article of claim 7, wherein: the surface of the heterostructure epitaxial layers is undoped or lightly doped; and the intermediate layer is electrically conductive.",
    "9. The article of claim 1, wherein the heterostructure epitaxial layers include an etch stop layer.",
    "10. The article of claim 1, further comprising a trigger device disposed on the support substrate, the trigger device configured to generate and apply an initial fracture force on the support substrate.",
    "11. The article of claim 10, wherein the support substrate is configured such that secondary fractures are generated in the support substrate in response to the initial fracture force and the secondary fractures propagate through and powderize the support substrate and the heterostructure epitaxial layers.",
    "12. A method, comprising: epitaxially growing heterostructure epitaxial layers on a growth substrate along a growth direction towards a surface of the heterostructure epitaxial layers; placing the surface of the heterostructure epitaxial layers on or near an ion rich bonding surface of a support substrate; bonding the heterostructure epitaxial layers to the support substrate by ion exchange between the bonding surface of the support substrate and the surface of the heterostructure epitaxial layers; applying at least one of heat and voltage during the bonding; and removing the growth substrate, wherein the support substrate and the heterostructure epitaxial layers are configured to powderize together in response to a trigger.",
    "13. The method of claim 12, wherein removing the growth substrate comprises completely removing the growth substrate leaving only the heterostructure epitaxial layers bonded to the support substrate.",
    "14. The method of claim 12, wherein a thickness of the heterostructure epitaxial layers is less than about 10 μm thick.",
    "15. The method of claim 12, wherein the support substrate is or comprises chemically tempered, glass.",
    "16. The method of claim 12, wherein epitaxially growing the heterostructure epitaxial layers comprises forming one or more electronic devices in the heterostructure epitaxial layers.",
    "17. The method of claim 12, wherein forming the electronic devices comprises forming one or more GaAs, InP, Si, and GaN-based electronic devices.",
    "18. The method of claim 12, further comprising forming a trigger device on the support substrate, the trigger device configured to generate and apply an initial fracture force on the support substrate in response to a trigger input.",
    "19. The method of claim 12, further comprising: disposing an intermediate layer on the heterostructure epitaxial layers; wherein placing the surface of the heterostructure epitaxial layers on or near the bonding surface comprises placing the intermediate layer on the bonding surface of the support substrate.",
    "20. The method of claim 19, wherein the intermediate layer is electrically conductive.",
    "21. The method of claim 12, wherein applying at least one of heat and voltage during the bonding comprises heating the heterostructure layers and the support substrate during the bonding and applying a voltage between the surface of the heterostructure epitaxial layers and the bonding surface during the bonding."
  ],
  "description_excerpt": "This disclosure relates generally to articles comprising epitaxially grown semiconductor heterostructure layers bonded to non-native substrates and to related methods.\n\nMonolithically integrating compound semiconductor devices such as laser diodes, light emitting diodes, and heterojunction transistors onto non-native substrates can open the door to many useful applications of these devices. However, most compound semiconductor devices require high quality epitaxially grown layers that can only be attained by crystalline growth on a lattice-matched or lattice-compatible substrate. This substrate restriction severely limits the functionality and application flexibility of many semiconductor devices.\n\nSome embodiments are directed to an article comprising a support substrate having bonding surface and heterostructure epitaxial layers that include one or more electronic devices. The heterostructure epitaxial layers have a surface and an epitaxial growth direction towards the surface. The heterostructure epitaxial layers are bonded to the support substrate at the surface of the heterostructure epitaxial layers by ion exchange between the surface of the heterostructure epitaxial layers and the bonding surface of the support substrate.\n\nSome embodiments involve a method that includes epitaxially growing heterostructure epitaxial layers on a growth substrate along a growth direction towards a surface of the heterostructure epitaxial layers. The surface of the heterostructure epitaxial layers is placed directly on or near an ion rich bonding surface of a support substrate.",
  "cpc": [
    "H10D 62/824",
    "H01L 21/02532",
    "H01L 21/0254",
    "H01L 21/02543",
    "H01L 21/02546",
    "H01L 21/02664",
    "H01L 29/2003",
    "H01L 29/205",
    "H01L 29/267",
    "H01S 5/0215",
    "H01S 5/0217",
    "H01S 5/34326",
    "H10D 30/475",
    "H10D 62/82",
    "H10D 62/8503",
    "H10H 20/018",
    "H10P 14/3411",
    "H10P 14/3416",
    "H10P 14/3418",
    "H10P 14/3421",
    "H10P 14/38",
    "H10W 10/011",
    "H10W 10/10"
  ],
  "ipc": [
    "H01L 21/02",
    "H10D 62/82",
    "H10D 62/824",
    "H10D 62/85"
  ],
  "assignees": [
    "Palo Alto Research Center Inc"
  ],
  "inventors": [
    "Christopher L. Chua",
    "Qian Wang",
    "Brent S. Krusor",
    "JengPing Lu",
    "Scott J. Limb"
  ],
  "filing_date": "2015-07-10",
  "publication_date": "2017-02-21",
  "grant_date": "2017-02-21",
  "priority_date": "2015-07-10",
  "application_number": "US-201514796440-A",
  "family_id": "57731496",
  "cited_by_count": 22,
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}