Ion scattering spectrometry

{
  "id": "MLC-T-CHM-006094",
  "term": "Ion scattering spectrometry",
  "field": "Chemistry",
  "definition": "A surface analysis technique where a beam of noble gas ions, typically helium or neon, is directed at a solid surface. The energy of the ions scattered from the surface atoms is measured, providing information about the elemental composition of the outermost atomic layer. The energy loss of the scattered ions is directly related to the mass of the surface atoms.",
  "subject": "Analytical Chemistry",
  "see_also": [
    "angle"
  ],
  "references": [
    "PAC, 1979, 51, 2243. 'General aspects of trace analytical methods - IV. Recommendations for nomenclature, standard procedures and reporting of experimental data for surface analysis techniques' on page 2246 (https://doi.org/10.1351/pac197951112243)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/ion-scattering-spectrometry/"
}