Medium-energy ion scattering spectrometry

{
  "id": "MLC-T-CHM-007139",
  "term": "Medium-energy ion scattering spectrometry",
  "field": "Chemistry",
  "definition": "A surface analysis technique that directs a monoenergetic beam of ions, with energies in the range of 50 to 500 keV, at a sample surface. The elemental composition and structure of the near-surface region are determined by analyzing the energy and angular distribution of the ions scattered from the target atoms. This method provides quantitative compositional information and is particularly sensitive to the arrangement of atoms in the outermost layers of a crystal.",
  "subject": "Analytical Chemistry",
  "see_also": [
    "depth profiling",
    "probe ion"
  ],
  "references": [
    "PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1785 (https://doi.org/10.1515/pac-2019-0404)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/medium-energy-ion-scattering-spectrometry/"
}