Low-energy ion scattering spectrometry

{
  "id": "MLC-T-CHM-006785",
  "term": "Low-energy ion scattering spectrometry",
  "field": "Chemistry",
  "definition": "A surface analysis technique that involves bombarding a solid surface with a beam of low-energy noble gas ions (typically 0.5-5 keV) and detecting the ions that are elastically scattered from the outermost atomic layer. The energy loss of the scattered ions is characteristic of the mass of the surface atoms, providing elemental composition information. This method is highly surface-sensitive, probing only the topmost atomic layer.",
  "subject": "Analytical Chemistry",
  "see_also": [
    "probe ion"
  ],
  "references": [
    "PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1784 (https://doi.org/10.1515/pac-2019-0404)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/low-energy-ion-scattering-spectrometry/"
}