Line edge roughness

{
  "id": "MLC-T-CHM-006604",
  "term": "Line edge roughness",
  "field": "Chemistry",
  "definition": "The deviation of the sidewall of a lithographically defined feature from a perfectly straight or smooth line. This irregularity is a measure of the statistical variation in the position of the line edge. It is quantified by parameters such as the root mean square (RMS) deviation of the line edge from an ideal straight line.",
  "subject": "Polymer",
  "see_also": [
    "resist"
  ],
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1876 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/line-edge-roughness/"
}