Proximity effect

{
  "id": "MLC-T-CHM-009620",
  "term": "Proximity effect",
  "field": "Chemistry",
  "definition": "A phenomenon in lithography where the exposure of a resist in one area is affected by the exposure of adjacent areas, primarily due to scattered electrons or photons. This effect can lead to unintended pattern distortion or broadening, especially in high-resolution patterning. Compensation techniques, such as dose modulation, are often applied to mitigate its impact.",
  "subject": "Polymer",
  "see_also": [
    "resist"
  ],
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1885 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/proximity-effect/"
}