Aspect ratio
Term · Chemistry · MLC-T-CHM-012895
The ratio of the height of a feature to its width, particularly in the context of micro- or nanofabrication. This dimensionless quantity describes the shape of structures created in materials, such as those formed in a resist layer during lithography. High aspect ratios indicate tall, narrow features, while low aspect ratios describe broad, flat features.
| Identifier | MLC-T-CHM-012895 |
|---|---|
| Field | Chemistry |
| Subject | Polymer |
| References | PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1867 (https://doi.org/10.1515/pac-2018-1215) |
| See also | Image; Resist |
Record as JSON
{
"id": "MLC-T-CHM-012895",
"term": "Aspect ratio",
"field": "Chemistry",
"definition": "The ratio of the height of a feature to its width, particularly in the context of micro- or nanofabrication. This dimensionless quantity describes the shape of structures created in materials, such as those formed in a resist layer during lithography. High aspect ratios indicate tall, narrow features, while low aspect ratios describe broad, flat features.",
"subject": "Polymer",
"see_also": [
"image",
"resist"
],
"references": [
"PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1867 (https://doi.org/10.1515/pac-2018-1215)"
],
"url": "https://mlchart.com/terminology/chemistry/aspect-ratio/"
}
Record 896 of 13,676 in Chemistry terminology (MLC-0109). Request the full dataset.