MLchartDataset catalogue

Aspect ratio

Term · Chemistry · MLC-T-CHM-012895

The ratio of the height of a feature to its width, particularly in the context of micro- or nanofabrication. This dimensionless quantity describes the shape of structures created in materials, such as those formed in a resist layer during lithography. High aspect ratios indicate tall, narrow features, while low aspect ratios describe broad, flat features.

Table 1. Record
IdentifierMLC-T-CHM-012895
FieldChemistry
SubjectPolymer
ReferencesPAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1867 (https://doi.org/10.1515/pac-2018-1215)
See alsoImage; Resist
Record as JSON
{
  "id": "MLC-T-CHM-012895",
  "term": "Aspect ratio",
  "field": "Chemistry",
  "definition": "The ratio of the height of a feature to its width, particularly in the context of micro- or nanofabrication. This dimensionless quantity describes the shape of structures created in materials, such as those formed in a resist layer during lithography. High aspect ratios indicate tall, narrow features, while low aspect ratios describe broad, flat features.",
  "subject": "Polymer",
  "see_also": [
    "image",
    "resist"
  ],
  "references": [
    "PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1867 (https://doi.org/10.1515/pac-2018-1215)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/aspect-ratio/"
}

Record 896 of 13,676 in Chemistry terminology (MLC-0109). Request the full dataset.