Ellipsometry

{
  "id": "MLC-T-CHM-003814",
  "term": "Ellipsometry",
  "field": "Chemistry",
  "definition": "An optical technique used to characterize the dielectric properties and thickness of thin films on a substrate. It measures the change in polarization state of light upon reflection or transmission from a material surface. Ellipsometry is non-destructive and can provide information on film thickness, refractive index, and absorption coefficient.",
  "subject": "Analytical Chemistry",
  "references": [
    "PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1790 (https://doi.org/10.1515/pac-2019-0404)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/ellipsometry/"
}