Patents full text · MLC-0201
CPC subclass H01J
Electric discharge tubes or discharge lamps
| No. | Publication | Title | Published | Assignee |
|---|---|---|---|---|
| 1 | US2026106122A1 | Dry chamber clean using thermal and plasma processes | 2026-04-16 | Lam Research Corp |
| 2 | US12603266B2 | Device and method for high power-density thermionic energy conversion | 2026-04-14 | Space Charge LLC |
| 3 | US12131937B2 | Transfer system, transfer device, and transfer method | 2024-10-29 | Tokyo Electron Ltd |
| 4 | US12104638B2 | Interlocking fastening upper electrode assembly having improved fastening force, and plasma device including same | 2024-10-01 | TEM CO Ltd |
| 5 | US12004337B2 | Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools | 2024-06-04 | Applied Materials Inc |
| 6 | US11978654B2 | Substrate processing apparatus | 2024-05-07 | Semes Co Ltd |
| 7 | US11688589B2 | Carrier with vertical grid for supporting substrates in coater | 2023-06-27 | View Inc |
| 8 | US11309168B2 | Vacuum processing apparatus and maintenance apparatus | 2022-04-19 | Tokyo Electron Ltd |
| 9 | US11268930B2 | Triggered sampling systems and methods | 2022-03-08 | Particle Measuring Systems Inc |
| 10 | US2022020575A1 | Apparatus for treating substrate, method for measuring height difference between lift pins, and computer readable recording medium having processing program stored therein | 2022-01-20 | Semes Co Ltd |
| 11 | US11211230B2 | Gas flow system | 2021-12-28 | Applied Materials Inc |
| 12 | US11127560B2 | Charged particle microscope with a manipulator device, and method of preparing a specimen with said charged particle microscope | 2021-09-21 | FEI Co |
| 13 | US11127559B2 | Portable vacuum antioxidant bag | 2021-09-21 | Korea Institute of Science and Technology KIST |
| 14 | US2021241992A1 | Examining, analyzing and/or processing an object using an object receiving container | 2021-08-05 | Carl Zeiss Microscopy GmbH |
| 15 | US10978286B2 | Coupling devices and source assemblies including them | 2021-04-13 | PerkinElmer Health Sciences Inc |
| 16 | US10794681B2 | Long range capacitive gap measurement in a wafer form sensor system | 2020-10-06 | Applied Materials Inc |
| 17 | US10699878B2 | Chamber member of a plasma source and pedestal with radially outward positioned lift pins for translation of a substrate c-ring | 2020-06-30 | Lam Research Corp |
| 18 | US10629409B2 | Specimen preparation and inspection in a dual-beam charged particle microscope | 2020-04-21 | FEI Co |
| 19 | US10610848B2 | Processing materials | 2020-04-07 | Xyleco Inc |
| 20 | US10603394B2 | UV sterilization of container, room, space or defined environment | 2020-03-31 | Bluemorph LLC |
| 21 | US10589251B2 | Equipment protecting enclosures | 2020-03-17 | Xyleco Inc |
| 22 | US10549241B2 | Enclosures for treating materials | 2020-02-04 | Xyleco Inc |
| 23 | US10518220B2 | Processing materials | 2019-12-31 | Xyleco Inc |
| 24 | US10350548B2 | Reconfigurable processing enclosures | 2019-07-16 | Xyleco Inc |
| 25 | US10347470B2 | Process chamber and semiconductor processing apparatus | 2019-07-09 | Beijing Naura Microelectronics Equipment Co Ltd |
| 26 | US10340125B2 | Pulsed remote plasma method and system | 2019-07-02 | ASM IP Holding BV |
| 27 | US10276355B2 | Multi-zone reactor, system including the reactor, and method of using the same | 2019-04-30 | ASM IP Holding BV |
| 28 | US10199204B2 | Target retaining apparatus | 2019-02-05 | Applied Materials Inc |
| 29 | US10163535B2 | Processing materials | 2018-12-25 | Xyleco Inc |
| 30 | US10153140B2 | Method of installing elastomer ring in semiconductor processing equipment and guiding sheet and jig used in installing elastomer ring | 2018-12-11 | MFC Sealing Technology Co Ltd |
| 31 | US10105652B2 | Array for processing materials | 2018-10-23 | Xyleco Inc |
| 32 | US9925496B2 | Upgrading process streams | 2018-03-27 | Xyleco Inc |
| 33 | US9921400B2 | System and method for manipulating an object for imaging | 2018-03-20 | City University of Hong Kong CityU |
| 34 | US9895811B2 | Targets and processes for fabricating same | 2018-02-20 | University of Nevada, Reno |
| 35 | US9816231B2 | Processing materials | 2017-11-14 | Xyleco Inc |
| 36 | US9777430B2 | Reconfigurable processing enclosures | 2017-10-03 | Xyleco Inc |
| 37 | US9691510B2 | Equipment protecting enclosures | 2017-06-27 | Xyleco Inc |
| 38 | US9659748B2 | Treating biomass | 2017-05-23 | Xyleco Inc |
| 39 | US9649763B2 | Micro-nano tools with changeable tips for micro-NANO manipulation | 2017-05-16 | |
| 40 | US9644266B2 | Film forming apparatus, gas supply device and film forming method | 2017-05-09 | Tokyo Electron Ltd |
| 41 | US9637802B2 | Upgrading process streams | 2017-05-02 | Xyleco Inc |
| 42 | US9611516B2 | Controlling process gases | 2017-04-04 | Xyleco Inc |
| 43 | US9601305B2 | Specimen sample holder for workpiece transport apparatus | 2017-03-21 | Howard Hughes Medical Institute |
| 44 | US9589770B2 | Method and systems for in-situ formation of intermediate reactive species | 2017-03-07 | ASM IP Holding BV |
| 45 | US9556496B2 | Processing biomass | 2017-01-31 | Xyleco Inc |
| 46 | US9499939B2 | Equipment protecting enclosures | 2016-11-22 | Xyleco Inc |
| 47 | US9455118B1 | Processing materials | 2016-09-27 | Xyleco Inc |
| 48 | US9449785B2 | Workpiece transport and positioning apparatus | 2016-09-20 | Howard Hughes Medical Institute |
| 49 | US9396981B2 | Vacuum treatment apparatus | 2016-07-19 | Evatec AG |
| 50 | US9368321B1 | Fiducial-based correlative microscopy | 2016-06-14 | FEI Co |
| 51 | US2016163561A1 | Technique to deposit sidewall passivation for high aspect ratio cylinder etch | 2016-06-09 | Lam Research Corp |
| 52 | US9334518B2 | Array for processing materials | 2016-05-10 | Xyleco Inc |
| 53 | US2013162134A1 | Device for producing an electron beam | 2013-06-27 | |
| 54 | US6776848B2 | Motorized chamber lid | 2004-08-17 | Applied Materials Inc |
| 55 | US6753498B2 | Automated electrode replacement apparatus for a plasma processing system | 2004-06-22 | Tokyo Electron Ltd |
| 56 | US6660662B2 | Method of reducing plasma charge damage for plasma processes | 2003-12-09 | Applied Materials Inc |
| 57 | US6641746B2 | Control of semiconductor processing | 2003-11-04 | Agere Systems LLC |
| 58 | US6558902B1 | Infrared matrix-assisted laser desorption/ionization mass spectrometric analysis of macromolecules | 2003-05-06 | Sequenom Inc |
| 59 | US6498107B1 | Interface control for film deposition by gas-cluster ion-beam processing | 2002-12-24 | TEL Epion Inc |
| 60 | US6440282B1 | Sputtering reactor and method of using an unbalanced magnetron | 2002-08-27 | Applied Materials Inc |
| 61 | US6436251B2 | Vault-shaped target and magnetron having both distributed and localized magnets | 2002-08-20 | Applied Materials Inc |
| 62 | US6412437B1 | Plasma enhanced chemical vapor deposition reactor and plasma enhanced chemical vapor deposition process | 2002-07-02 | Micron Technology Inc |
| 63 | US6397776B1 | Apparatus for large area chemical vapor deposition using multiple expanding thermal plasma generators | 2002-06-04 | General Electric Co |
| 64 | US6376989B1 | Dimmable discharge lamp for dielectrically impeded discharges | 2002-04-23 | Patent Treuhand Gesellschaft fuer Elektrische Gluehlampen mbH |
| 65 | US6327339B1 | Industrial x-ray/electron beam source using an electron accelerator | 2001-12-04 | KOREA ACCELERATOR AND PLASMA ASSOCIATION |
| 66 | US6235478B1 | DNA diagnostics based on mass spectrometry | 2001-05-22 | Sequenom Inc |
| 67 | US6221605B1 | DNA diagnostics based on mass spectrometry | 2001-04-24 | Sequenom Inc |
| 68 | US6123775A | Reaction chamber component having improved temperature uniformity | 2000-09-26 | Lam Research Corp |
| 69 | US6116257A | Micromotors, linear motors, micropumps, methods of using the same, microactuators, methods of controlling flow properties of fluids, and apparatuses for controlling flow properties of fluids | 2000-09-12 | New Technology Management Co Ltd |
| 70 | US5942074A | Single-piece gas director for plasma reactors | 1999-08-24 | Lam Research Corp |
| 71 | US5798139A | Apparatus for and method of manufacturing plastic container coated with carbon film | 1998-08-25 | Samco International Inc |
| 72 | US5705079A | Method for forming spacers in flat panel displays using photo-etching | 1998-01-06 | Micron Display Technology Inc |
| 73 | US5665167A | Plasma treatment apparatus having a workpiece-side electrode grounding circuit | 1997-09-09 | Tokyo Electron Ltd |
| 74 | US5422139A | Method for a reactive surface treatment of a workpiece and a treatment chamber for practicing such method | 1995-06-06 | Balzers AG |
| 75 | US5270552A | Method for separating specimen and method for analyzing the specimen separated by the specimen separating method | 1993-12-14 | Hitachi Ltd |
| 76 | US5259877A | Apparatus with changeover grooves for forming phosphor layer in cathode-ray tube | 1993-11-09 | Sony Corp |
| 77 | US5236512A | Method and apparatus for cleaning surfaces with plasma | 1993-08-17 | Thiokol Corp |
| 78 | US5156727A | Film thickness uniformity control apparatus for in-line sputtering systems | 1992-10-20 | Viratec Thin Films Inc |
| 79 | US4305000A | Process of and apparatus for cold-cathode electron-beam generation for sterilization of surfaces and similar applications | 1981-12-08 | Tetra Pak Developpement SA |
| 80 | US4101411A | Plasma etching apparatus | 1978-07-18 | Hitachi Ltd |
| 81 | US3814356A | Electron microscope | 1974-06-04 |
81 records in this listing. Patents full text (MLC-0201). Request the full dataset.