Pulsed remote plasma method and system

{
  "publication_number": "US10340125B2",
  "country": "US",
  "kind": "B2",
  "title": "Pulsed remote plasma method and system",
  "abstract": "A system and method for providing pulsed excited species from a remote plasma unit to a reaction chamber are disclosed. The system includes a pressure control device to control a pressure at the remote plasma unit as reactive species from the remote plasma unit are pulsed to the reaction chamber.",
  "claims": [
    "1. A method for providing excited species to a reaction chamber of a reactor, the method comprising the steps of: providing a first gas to a remote plasma unit; using a pressure control device located between the remote plasma unit and a vacuum source and a control valve between the remote plasma unit and the reaction chamber, controlling a pressure of the remote plasma unit located upstream of the pressure control device; forming a plasma in a remote plasma unit; and pulsing first excited species to the reaction chamber, while maintaining steady-state conditions for the remote plasma unit, by switching a flow of the first excited species between the reaction chamber and a vacuum source using the control valve.",
    "2. The method for providing excited species to a reaction chamber of a reactor of claim 1, further comprising the steps of: providing a second reactant to the remote plasma unit to form a second excited species; and pulsing the second excited species to the reaction chamber.",
    "3. The method for providing excited species to a reaction chamber of a reactor of claim 1, wherein the step of controlling a pressure of the remote plasma unit comprises using a closed-loop upstream pressure controller.",
    "4. The method for providing excited species to a reaction chamber of a reactor of claim 1, wherein the step of forming a plasma in a remote plasma unit comprises forming a plasma using a unit selected from the group consisting of inductively couple plasma unit and microwave unit.",
    "5. The method for providing excited species to a reaction chamber of a reactor of claim 1, wherein the step of pulsing the first excited species to the reaction chamber comprises controlling the control valve between the remote plasma unit and the reaction chamber.",
    "6. The method for providing excited species to a reaction chamber of a reactor of claim 1, further comprising a step of depositing material onto a surface of a substrate.",
    "7. The method for providing excited species to a reaction chamber of a reactor of claim 1, further comprising a step of etching a material on a surface of a substrate.",
    "8. The method for providing excited species to a reaction chamber of a reactor of claim 1, further comprising a step of cleaning a surface of a substrate.",
    "9. The method for providing excited species to a reaction chamber of a reactor of claim 1, further comprising a step of treating a surface of a substrate.",
    "10. The method for providing excited species to a reaction chamber of a reactor of claim 1, further comprising a step of treating a surface of the reaction chamber.",
    "11. The method for providing excited species to a reaction chamber of a reactor of claim 1, further comprising a step of cleaning a surface of the reaction chamber.",
    "12. The method for providing excited species to a reaction chamber of a reactor of claim 1, further comprising providing a controller coupled to pressure control device.",
    "13. The method for providing excited species to a reaction chamber of a reactor of claim 12, wherein the controller is further coupled to the control valve.",
    "14. The method for providing excited species to a reaction chamber of a reactor of claim 1, further comprising a step of purging the reaction chamber."
  ],
  "description_excerpt": "The disclosure generally relates to vapor-phase methods and systems. More particularly, exemplary embodiments of the present disclosure relate to pulsed remote plasma methods and systems.\n\nRemote plasma deposition systems, such as plasma-enhanced chemical vapor deposition (PECVD) systems and plasma-enhanced atomic layer deposition (PEALD) systems, as well as remote plasma etching and treatment systems can be used for a variety of purposes. For example, remote plasma deposition systems can be used to deposit thin films of material onto a substrate, and the remote plasma etching and treatment reactors can be used to etch material from a substrate, clean a reactor surface, treat a substrate surface, and/or treat a reactor surface.\n\nIn general, remote plasma systems include a reactor having a reaction chamber, one or more gas sources coupled to the reaction chamber, and a remote plasma source between one or more gas sources and the reaction chamber. Remote plasma systems are thought to be advantageous over thermal systems for some applications, because the remote plasma can generate excited reactive species at relatively low temperatures, allowing reactions to take place at effectively lower temperatures. Remote plasma systems may also be advantageous over direct plasma systems, because, unlike direct plasma systems, remote plasma systems do not form a plasma directly over a surface of a substrate or within a reaction chamber. As a result, surface damage to a substrate or reaction chamber that might otherwise occur in a direct plasma reactor can be reduced or eliminated.",
  "cpc": [
    "H01J 37/32449",
    "B08B 7/0035",
    "C23C 16/452",
    "C23C 16/45536",
    "C23C 16/45538",
    "C23C 16/50",
    "C23C 16/507",
    "H01J 2237/332",
    "H01J 2237/334",
    "H01J 2237/335",
    "H01J 37/32357",
    "H01J 37/32422",
    "H01J 37/32816"
  ],
  "ipc": [
    "B08B 7/00",
    "C23C 16/455",
    "C23C 16/50",
    "H01J 37/32",
    "C23C 16/452",
    "C23C 16/507"
  ],
  "assignees": [
    "ASM IP Holding BV"
  ],
  "inventors": [
    "Jereld Lee Winkler"
  ],
  "filing_date": "2016-09-22",
  "publication_date": "2019-07-02",
  "grant_date": "2019-07-02",
  "priority_date": "2013-03-08",
  "application_number": "US-201615273488-A",
  "family_id": "51486559",
  "cited_by_count": 416,
  "citations": [
    "US3089507A",
    "US2059480A",
    "US2161626A",
    "US2266416A",
    "US2280778A",
    "US2410420A",
    "US2563931A",
    "US2660061A",
    "US2745640A",
    "GB752277A",
    "US3094396A",
    "US2990045A",
    "US3038951A",
    "US3232437A",
    "US3410349A",
    "US3263502A",
    "FR1408266A",
    "US3588192A",
    "US3647387A",
    "US3647716A",
    "US4393013A",
    "US3713899A",
    "US3885504A",
    "US3718429A",
    "US4093491A",
    "US3833492A",
    "US3862397A",
    "US3867205A",
    "US3913058A",
    "US3960559A",
    "US3913617A",
    "FR2233614A1",
    "US3854443A",
    "US3947685A",
    "US3904371A",
    "US3887790A",
    "US4058430A",
    "US4054071A",
    "US4134425A",
    "USD249341S",
    "US4194536A",
    "US4181330A",
    "US4164959A",
    "US4176630A",
    "US4126027A",
    "US4145699A",
    "US4217463A",
    "US4234449A",
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