Method of reforming insulating film deposited on substrate with recess pattern

{
  "publication_number": "US10283353B2",
  "country": "US",
  "kind": "B2",
  "title": "Method of reforming insulating film deposited on substrate with recess pattern",
  "abstract": "A method of reforming an insulating film deposited on a substrate having a recess pattern constituted by a bottom and sidewalls, includes: providing the film deposited on the substrate having the recess pattern in an evacuatable reaction chamber, wherein a property of a portion of the film deposited on the sidewalls is inferior to that of a portion of the film deposited on a top surface of the substrate; adjusting a pressure of an atmosphere of the reaction chamber to 10 Pa or less, which atmosphere is constituted by H 2 and/or He without a precursor and without a reactant; and applying RF power to the atmosphere of the pressure-adjusted reaction chamber to generate a plasma to which the film is exposed, thereby reforming the portion of the film deposited on the sidewalls to improve the property of the sidewall portion of the film.",
  "claims": [
    "1. A method of reforming a conformal insulating film deposited on a substrate having a recess pattern constituted by a bottom and sidewalls, comprising: (i) providing the film deposited on the substrate having the recess pattern in an evacuatable reaction chamber, wherein a wet-etching property of a portion of the film deposited on the sidewalls is inferior to that of a portion of the film deposited on a top surface of the substrate; (ii) adjusting a pressure of an atmosphere of the reaction chamber to 10 Pa or less, which atmosphere is constituted by H 2 and/or He without a precursor and without a reactant; and (iii) applying RF power to the atmosphere of the pressure-adjusted reaction chamber to generate a plasma to which the film is exposed, thereby reforming the portion of the film deposited on the sidewalls, without forming a film, to improve the property of the sidewall portion of the film.",
    "2. The method according to claim 1, wherein the pressure of the atmosphere of the reaction chamber is 2 Pa or less.",
    "3. The method according to claim 1, wherein in step (iii), RF power is applied at a power of 2 W/cm 2 or higher relative to the top surface of the substrate.",
    "4. The method according to claim 1, wherein in step (ii), the atmosphere of the reaction chamber further contains N 2 at a concentration of 1% or less.",
    "5. The method according to claim 1, wherein in step (i), a pressure of an atmosphere of the reaction chamber is controlled using a dry pump connected to the reaction chamber, and in step (ii), the pressure of the atmosphere of the reaction chamber is controlled using a turbomolecular pump connected to the reaction chamber.",
    "6. The method according to claim 1, wherein in step (iii), the reforming of the portion of the film is accomplished by removing hydrogen contained in the film as an impurity, using the plasma.",
    "7. The method according to claim 1, wherein in step (i), the film has a thickness of 10 nm or less.",
    "8. The method according to claim 1, wherein step (iii) is conducted until the property of the sidewall portion of the film is improved to be substantially equivalent to the property of a portion of the film deposited on the bottom of the recess pattern or a top surface of the substrate.",
    "9. The method according to claim 1, wherein the property of the film is resistance to wet etching.",
    "10. The method according to claim 1, wherein the film is an oxide film or nitride film.",
    "11. The method according to claim 10, wherein the film is selected from the group consisting of SiO 2, SiN, SiOC, SiCN, GeOx, GeN, AlOx, AlN, TiO 2, and TaO 2.",
    "12. The method according to claim 1, wherein step (i) comprises depositing the film in the reaction chamber by cyclic deposition.",
    "13. The method according to claim 12, wherein the film is deposited by one cycle or multiple cycles of the cyclic deposition.",
    "14. The method according to claim 13, wherein the cyclic deposition is plasma-enhanced atomic layer deposition (PEALD).",
    "15. The method according to claim 13, wherein steps (i) through (iii) are repeated.",
    "16. The method according to claim 1, further comprising, between steps (i) and (ii), evacuating the reaction chamber to reduce the pressure to less than the pressure used in step (ii).",
    "17. The method according to claim 1, wherein in step (ii), the atmosphere contains no gas other than H 2, He, and N 2.",
    "18. The method according to claim 17, wherein the atmosphere consists of H 2.",
    "19. The method according to claim 1, wherein the recess pattern is constituted by trenches having a width of 20 nm to 100 nm and an aspect ratio of 2 to 10.",
    "20. The method according to claim 1, wherein in step (iii), RF power is applied to an upper electrode which is capacitively coupled with a lower electrode on which the substrate is placed.",
    "21. The method according to claim 1, wherein in step (i), a portion of the film deposited on the bottom of the recess pattern is thicker than the portion at the sidewalls of the recess pattern and the portion at the top surface of the substrate."
  ],
  "cpc": [
    "H10P 14/6532",
    "H01L 21/02274",
    "H01L 21/0228",
    "H01L 21/02318",
    "H01L 21/0234",
    "H01L 21/0332",
    "H01L 21/0337",
    "H10P 14/6336",
    "H10P 14/6339",
    "H10P 14/6516",
    "H10P 14/6682",
    "H10P 14/6687",
    "H10P 14/69215",
    "H10P 14/69391",
    "H10P 14/69433",
    "H10P 50/283",
    "H10P 76/405",
    "H10P 76/4085",
    "H10P 95/00"
  ],
  "assignees": [
    "ASM IP HOLDING BV",
    "UNIV NAGOYA NAT UNIV CORP"
  ],
  "filing_date": "2017-03-29",
  "publication_date": "2019-05-07",
  "grant_date": "2019-05-07",
  "priority_date": "2017-03-29",
  "application_number": "US-201715472750-A",
  "family_id": "63670996",
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    "US2001049080A1",
    "US2001049202A1",
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    "US2002064592A1",
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    "US2002079714A1",
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    "US2002088542A1",
    "US2002096211A1",
    "US2002098627A1",
    "US2002108670A1",
    "US2002109115A1",
    "US2002110695A1",
    "US2002110991A1",
    "US2002112114A1",
    "US2002114886A1",
    "US2002115252A1",
    "US2002124883A1",
    "US2002127350A1",
    "US2002134511A1",
    "US2002136214A1",
    "US2002136909A1",
    "US2002139775A1",
    "US2002146512A1",
    "US2002151327A1",
    "US2002152244A1",
    "US2002155219A1",
    "US2002164420A1",
    "US2002172768A1",
    "US2002174106A1",
    "US2002179011A1",
    "US2002184111A1",
    "US2002187650A1",
    "US2002187656A1",
    "US2002197849A1",
    "US2003002562A1",
    "US2003003607A1",
    "US2003003635A1",
    "US2003003696A1",
    "US2003010451A1",
    "US2003010452A1",
    "US2003012632A1",
    "US2003015294A1",
    "US2003015596A1",
    "US2003017268A1",
    "US2003019428A1",
    "US2003019580A1",
    "US2003022523A1",
    "US2003023338A1",
    "US2003024901A1",
    "US2003025146A1",
    "US2003029303A1",
    "US2003029381A1",
    "US2003029475A1",
    "US2003035002A1",
    "US2003036272A1",
    "US2003040158A1",
    "US2003040841A1",
    "US2003042419A1",
    "US2003049372A1",
    "US2003049375A1",
    "US2003049937A1",
    "US2003054670A1",
    "US2003059535A1",
    "US2003059980A1",
    "US2003065413A1",
    "US2003066826A1",
    "US2003071015A1",
    "US2003075925A1",
    "US2003082296A1",
    "US2003082307A1",
    "US2003091938A1",
    "US2003094133A1",
    "US2003109107A1",
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    "US2003116087A1",
    "US2003121608A1",
    "US2003133854A1",
    "US2003134038A1",
    "US2003141820A1",
    "US2003143328A1",
    "US2003157436A1",
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    "US2003168699A1",
    "US2003168750A1",
    "US2003170583A1",
    "US2003173490A1",
    "US2003180458A1",
    "US2003183156A1",
    "US2003183856A1",
    "US2003188685A1",
    "US2003192875A1",
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    "US2003201541A1",
    "US2003209323A1",
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    "US2003217915A1",
    "US2003219972A1",
    "US2003226840A1",
    "US2003228772A1",
    "US2003231698A1",
    "US2003232138A1",
    "US2003232491A1",
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    "US2004009307A1",
    "US2004009679A1",
    "US2004010772A1",
    "US2004013577A1",
    "US2004013818A1",
    "US2004016637A1",
    "US2004018304A1",
    "US2004018307A1",
    "US2004018723A1",
    "US2004018750A1",
    "US2004023516A1",
    "US2004026372A1",
    "US2004029052A1",
    "US2004036129A1",
    "US2004037675A1",
    "US2004048439A1",
    "US2004048492A1",
    "US2004050325A1",
    "US2004062081A1",
    "US2004063289A1",
    "US2004071897A1",
    "US2004077182A1",
    "US2004079960A1",
    "US2004080697A1",
    "US2004082171A1",
    "US2004087141A1",
    "US2004094402A1",
    "US2004099213A1",
    "US2004101622A1",
    "US2004103914A1",
    "US2004106249A1",
    "US2004124131A1",
    "US2004124549A1",
    "US2004126990A1",
    "US2004129211A1",
    "US2004129671A1",
    "US2004134429A1",
    "US2004144311A1",
    "US2004144980A1",
    "US2004146644A1",
    "US2004151844A1",
    "US2004151845A1",
    "US2004152287A1",
    "US2004159343A1",
    "US2004168627A1",
    "US2004169032A1",
    "US2004187777A1",
    "US2004187790A1",
    "US2004187928A1",
    "US2004198069A1",
    "US2004200499A1",
    "US2004203251A1",
    "US2004206305A1",
    "US2004209477A1",
    "US2004211357A1",
    "US2004212947A1",
    "US2004213921A1",
    "US2004214399A1",
    "US2004214445A1",
    "US2004217217A1",
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    "US2004221807A1",
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    "US2004261712A1",
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    "US2005019026A1",
    "US2005019494A1",
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    "US2005023624A1",
    "US2005034674A1",
    "US2005037154A1",
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    "US2005229849A1",
    "US2005229972A1",
    "US2005233477A1",
    "US2005241176A1",
    "US2005241763A1",
    "US2005245058A1",
    "US2005249876A1",
    "US2005250340A1",
    "US2005251990A1",
    "US2005252449A1",
    "US2005255257A1",
    "US2005258280A1",
    "US2005260347A1",
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    "US2005263072A1",
    "US2005263075A1",
    "US2005263932A1",
    "US2005271813A1",
    "US2005274323A1",
    "US2005277271A1",
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    "US2005285097A1",
    "US2005287725A1",
    "US2005287771A1",
    "US2006000411A1",
    "US2006013674A1",
    "US2006013946A1",
    "US2006014384A1",
    "US2006014397A1",
    "US2006016783A1",
    "US2006019033A1",
    "US2006019502A1",
    "US2006021572A1",
    "US2006021703A1",
    "US2006024439A2",
    "US2006026314A1",
    "US2006040054A1",
    "US2006040508A1",
    "US2006046518A1",
    "US2006051520A1",
    "US2006051925A1",
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    "US2006060930A1",
    "US2006062910A1",
    "US2006063346A1",
    "US2006068104A1",
    "US2006068121A1",
    "US2006068125A1",
    "US2006087638A1",
    "US2006096540A1",
    "US2006099782A1",
    "US2006105566A1",
    "US2006107898A1",
    "US2006110934A1",
    "US2006113675A1",
    "US2006113806A1",
    "US2006128142A1",
    "US2006128168A1",
    "US2006130767A1",
    "US2006137609A1",
    "US2006147626A1",
    "US2006148180A1",
    "US2006154424A1",
    "US2006156981A1",
    "US2006163612A1",
    "US2006166428A1",
    "US2006172531A1",
    "US2006175669A1",
    "US2006177855A1",
    "US2006182885A1",
    "US2006188360A1",
    "US2006191555A1",
    "US2006193979A1",
    "US2006196420A1",
    "US2006199357A1",
    "US2006205223A1",
    "US2006208215A1",
    "US2006211243A1",
    "US2006211259A1",
    "US2006213439A1",
    "US2006216942A1",
    "US2006219169A1",
    "US2006223301A1",
    "US2006226117A1",
    "US2006228496A1",
    "US2006228863A1",
    "US2006228888A1",
    "US2006236934A1",
    "US2006240574A1",
    "US2006240662A1",
    "US2006249253A1",
    "US2006251827A1",
    "US2006252228A1",
    "US2006252351A1",
    "US2006257563A1",
    "US2006257584A1",
    "US2006258078A1",
    "US2006258173A1",
    "US2006260545A1",
    "US2006263522A1",
    "US2006264060A1",
    "US2006264066A1",
    "US2006266289A1",
    "US2006269690A1",
    "US2006269692A1",
    "US2006275933A1",
    "US2006278524A1",
    "US2006283629A1",
    "US2006286774A1",
    "US2006286775A1",
    "US2006286818A1",
    "US2006286819A1",
    "US2006291982A1",
    "US2007006806A1",
    "US2007010072A1",
    "US2007012402A1",
    "US2007020830A1",
    "US2007020953A1",
    "US2007022954A1",
    "US2007026148A1",
    "US2007028842A1",
    "US2007031598A1",
    "US2007031599A1",
    "US2007032082A1",
    "US2007034477A1",
    "US2007037412A1",
    "US2007042117A1",
    "US2007049053A1",
    "US2007054499A1",
    "US2007056843A1",
    "US2007056850A1",
    "US2007059948A1",
    "US2007062439A1",
    "US2007062453A1",
    "US2007065578A1",
    "US2007066010A1",
    "US2007066079A1",
    "US2007066084A1",
    "US2007077355A1",
    "US2007082132A1",
    "US2007082500A1",
    "US2007084405A1",
    "US2007087579A1",
    "US2007089670A1",
    "US2007096194A1",
    "US2007098527A1",
    "US2007107845A1",
    "US2007111470A1",
    "US2007111545A1",
    "US2007116873A1",
    "US2007116888A1",
    "US2007119370A1",
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    "US2007123189A1",
    "US2007125762A1",
    "US2007128538A1",
    "US2007128876A1",
    "US2007128888A1",
    "US2007129621A1",
    "US2007134942A1",
    "US2007137794A1",
    "US2007146621A1",
    "US2007148350A1",
    "US2007148990A1",
    "US2007155138A1",
    "US2007157466A1",
    "US2007158026A1",
    "US2007163440A1",
    "US2007163625A1",
    "US2007166457A1",
    "US2007166966A1",
    "US2007166999A1",
    "US2007173071A1",
    "US2007175393A1",
    "US2007175397A1",
    "US2007178235A1",
    "US2007186952A1",
    "US2007187363A1",
    "US2007202678A1",
    "US2007207275A1",
    "US2007209590A1",
    "US2007210890A1",
    "US2007215048A1",
    "US2007218200A1",
    "US2007218705A1",
    "US2007224777A1",
    "US2007224833A1",
    "US2007232031A1",
    "US2007232071A1",
    "US2007232501A1",
    "US2007234955A1",
    "US2007237697A1",
    "US2007237698A1",
    "US2007237699A1",
    "US2007241688A1",
    "US2007248767A1",
    "US2007249131A1",
    "US2007251444A1",
    "US2007251456A1",
    "US2007252244A1",
    "US2007252532A1",
    "US2007258506A1",
    "US2007264807A1",
    "US2007266945A1",
    "US2007269983A1",
    "US2007275166A1",
    "US2007277735A1",
    "US2007281082A1",
    "US2007281105A1",
    "US2007281496A1",
    "US2007298362A1",
    "US2008003824A1",
    "US2008003838A1",
    "US2008006208A1",
    "US2008018004A1",
    "US2008020591A1",
    "US2008020593A1",
    "US2008023436A1",
    "US2008026574A1",
    "US2008026597A1",
    "US2008029790A1",
    "US2008031708A1",
    "US2008036354A1",
    "US2008038485A1",
    "US2008042165A1",
    "US2008043803A1",
    "US2008050536A1",
    "US2008050538A1",
    "US2008054332A1",
    "US2008054813A1",
    "US2008056860A1",
    "US2008057659A1",
    "US2008061667A1",
    "US2008066778A1",
    "US2008069955A1",
    "US2008075562A1",
    "US2008075881A1",
    "US2008076266A1",
    "US2008081104A1",
    "US2008081113A1",
    "US2008081121A1",
    "US2008085226A1",
    "US2008092815A1",
    "US2008102203A1",
    "US2008113094A1",
    "US2008113096A1",
    "US2008113097A1",
    "US2008118334A1",
    "US2008121177A1",
    "US2008121626A1",
    "US2008124197A1",
    "US2008124908A1",
    "US2008124946A1",
    "US2008132046A1",
    "US2008133154A1",
    "US2008142483A1",
    "US2008149031A1",
    "US2008152463A1",
    "US2008153311A1",
    "US2008157157A1",
    "US2008157365A1",
    "US2008173237A1",
    "US2008173238A1",
    "US2008173240A1",
    "US2008173326A1",
    "US2008176375A1",
    "US2008178805A1",
    "US2008179104A1",
    "US2008179715A1",
    "US2008182075A1",
    "US2008182390A1",
    "US2008191193A1",
    "US2008199977A1",
    "US2008202416A1",
    "US2008202689A1",
    "US2008203487A1",
    "US2008205483A1",
    "US2008211423A1",
    "US2008211526A1",
    "US2008216077A1",
    "US2008216742A1",
    "US2008220619A1",
    "US2008224240A1",
    "US2008228306A1",
    "US2008233288A1",
    "US2008237572A1",
    "US2008241384A1",
    "US2008241387A1",
    "US2008242116A1",
    "US2008248310A1",
    "US2008257494A1",
    "US2008260963A1",
    "US2008261413A1",
    "US2008264337A1",
    "US2008267598A1",
    "US2008268635A1",
    "US2008277715A1",
    "US2008282970A1",
    "US2008283962A1",
    "US2008289574A1",
    "US2008291964A1",
    "US2008295872A1",
    "US2008298945A1",
    "US2008299326A1",
    "US2008299758A1",
    "US2008302303A1",
    "US2008305014A1",
    "US2008305246A1",
    "US2008305443A1",
    "US2008315292A1",
    "US2008317972A1",
    "US2009000550A1",
    "US2009000551A1",
    "US2009011145A1",
    "US2009011608A1",
    "US2009017631A1",
    "US2009020072A1",
    "US2009023229A1",
    "US2009029503A1",
    "US2009029528A1",
    "US2009029564A1",
    "US2009033907A1",
    "US2009035947A1",
    "US2009041952A1",
    "US2009041984A1",
    "US2009042344A1",
    "US2009042408A1",
    "US2009045829A1",
    "US2009050621A1",
    "US2009052498A1",
    "US2009053023A1",
    "US2009053906A1",
    "US2009056629A1",
    "US2009057269A1",
    "US2009061083A1",
    "US2009061644A1",
    "US2009061647A1",
    "US2009075491A1",
    "US2009085156A1",
    "US2009090382A1",
    "US2009093094A1",
    "US2009095221A1",
    "US2009104351A1",
    "US2009104789A1",
    "US2009107404A1",
    "US2009108308A1",
    "US2009112458A1",
    "US2009120580A1",
    "US2009122293A1",
    "US2009122458A1",
    "US2009124131A1",
    "US2009130331A1",
    "US2009130859A1",
    "US2009136668A1",
    "US2009136683A1",
    "US2009139657A1",
    "US2009142905A1",
    "US2009142935A1",
    "US2009146322A1",
    "US2009156015A1",
    "US2009159000A1",
    "US2009159424A1",
    "US2009162996A1",
    "US2009163038A1",
    "US2009165715A1",
    "US2009179365A1",
    "US2009186571A1",
    "US2009197015A1",
    "US2009200494A1",
    "US2009204403A1",
    "US2009206056A1",
    "US2009209081A1",
    "US2009211523A1",
    "US2009211525A1",
    "US2009227094A1",
    "US2009230211A1",
    "US2009236014A1",
    "US2009236276A1",
    "US2009239386A1",
    "US2009242957A1",
    "US2009246374A1",
    "US2009246399A1",
    "US2009246971A1",
    "US2009250955A1",
    "US2009255901A1",
    "US2009261331A1",
    "US2009269506A1",
    "US2009269941A1",
    "US2009275205A1",
    "US2009277510A1",
    "US2009283041A1",
    "US2009283217A1",
    "US2009286400A1",
    "US2009286402A1",
    "US2009289300A1",
    "US2009302434A1",
    "US2009304558A1",
    "US2009308315A1",
    "US2009308425A1",
    "US2009311857A1",
    "US2009315093A1",
    "US2009320754A1",
    "US2009325391A1",
    "US2009325469A1",
    "US2010001409A1",
    "US2010003406A1",
    "US2010006031A1",
    "US2010006923A1",
    "US2010014479A1",
    "US2010015813A1",
    "US2010018460A1",
    "US2010024727A1",
    "US2010024872A1",
    "US2010025796A1",
    "US2010032587A1",
    "US2010032842A1",
    "US2010040441A1",
    "US2010041179A1",
    "US2010041243A1",
    "US2010050943A1",
    "US2010051597A1",
    "US2010055312A1",
    "US2010055442A1",
    "US2010058984A1",
    "US2010065758A1",
    "US2010068009A1",
    "US2010068891A1",
    "US2010075507A1",
    "US2010081094A1",
    "US2010089320A1",
    "US2010089870A1",
    "US2010090149A1",
    "US2010092696A1",
    "US2010093187A1",
    "US2010102417A1",
    "US2010105936A1",
    "US2010112496A1",
    "US2010116207A1",
    "US2010116209A1",
    "US2010124610A1",
    "US2010124618A1",
    "US2010124621A1",
    "US2010126415A1",
    "US2010126539A1",
    "US2010126605A1",
    "US2010129990A1",
    "US2010130015A1",
    "US2010130017A1",
    "US2010130105A1",
    "US2010134023A1",
    "US2010136216A1",
    "US2010140221A1",
    "US2010143609A1",
    "US2010144162A1",
    "US2010144968A1",
    "US2010145547A1",
    "US2010151206A1",
    "US2010159638A1",
    "US2010162752A1",
    "US2010162956A1",
    "US2010163524A1",
    "US2010163937A1",
    "US2010168404A1",
    "US2010170441A1",
    "US2010170868A1",
    "US2010173432A1",
    "US2010178137A1",
    "US2010178423A1",
    "US2010180819A1",
    "US2010183825A1",
    "US2010184302A1",
    "US2010186669A1",
    "US2010193501A1",
    "US2010195392A1",
    "US2010202860A1",
    "US2010221452A1",
    "US2010229795A1",
    "US2010230051A1",
    "US2010230863A1",
    "US2010233885A1",
    "US2010233886A1",
    "US2010236691A1",
    "US2010243166A1",
    "US2010244688A1",
    "US2010246630A1",
    "US2010248465A1",
    "US2010255198A1",
    "US2010255218A1",
    "US2010255625A1",
    "US2010255658A1",
    "US2010259152A1",
    "US2010266765A1",
    "US2010267248A1",
    "US2010270675A1",
    "US2010275846A1",
    "US2010282163A1",
    "US2010282170A1",
    "US2010282645A1",
    "US2010285237A1",
    "US2010285319A1",
    "US2010294199A1",
    "US2010297391A1",
    "US2010301752A1",
    "US2010304047A1",
    "US2010307415A1",
    "US2010317198A1",
    "US2010322604A1",
    "US2010326358A1",
    "US2011000619A1",
    "US2011006402A1",
    "US2011006406A1",
    "US2011014359A1",
    "US2011014795A1",
    "US2011027725A1",
    "US2011027999A1",
    "US2011034039A1",
    "US2011045610A1",
    "US2011046314A1",
    "US2011048642A1",
    "US2011049100A1",
    "US2011052833A1",
    "US2011053383A1",
    "US2011056513A1",
    "US2011056626A1",
    "US2011057248A1",
    "US2011061810A1",
    "US2011070380A1",
    "US2011081519A1",
    "US2011083496A1",
    "US2011086516A1",
    "US2011089469A1",
    "US2011097901A1",
    "US2011107512A1",
    "US2011108194A1",
    "US2011108741A1",
    "US2011108929A1",
    "US2011117490A1",
    "US2011117737A1",
    "US2011117749A1",
    "US2011124196A1",
    "US2011139272A1",
    "US2011139748A1",
    "US2011140172A1",
    "US2011143032A1",
    "US2011143461A1",
    "US2011159202A1",
    "US2011159673A1",
    "US2011159680A1",
    "US2011168330A1",
    "US2011171775A1",
    "US2011175011A1",
    "US2011180233A1",
    "US2011183079A1",
    "US2011183269A1",
    "US2011183527A1",
    "US2011192820A1",
    "US2011198417A1",
    "US2011198736A1",
    "US2011210468A1",
    "US2011220874A1",
    "US2011236600A1",
    "US2011237040A1",
    "US2011239936A1",
    "US2011254052A1",
    "US2011256675A1",
    "US2011256726A1",
    "US2011256727A1",
    "US2011256734A1",
    "US2011263107A1",
    "US2011265549A1",
    "US2011265715A1",
    "US2011265725A1",
    "US2011265951A1",
    "US2011275018A1",
    "US2011275166A1",
    "US2011277690A1",
    "US2011281417A1",
    "US2011283933A1",
    "US2011291243A1",
    "US2011294075A1",
    "US2011294288A1",
    "US2011298062A1",
    "US2011300720A1",
    "US2011308453A1",
    "US2011308460A1",
    "US2011312191A1",
    "US2012003500A1",
    "US2012006489A1",
    "US2012009802A1",
    "US2012024227A1",
    "US2012024479A1",
    "US2012028454A1",
    "US2012031333A1",
    "US2012032311A1",
    "US2012033695A1",
    "US2012036732A1",
    "US2012040528A1",
    "US2012043556A1",
    "US2012046421A1",
    "US2012052681A1",
    "US2012058630A1",
    "US2012064690A1",
    "US2012068242A1",
    "US2012070136A1",
    "US2012070997A1",
    "US2012074533A1",
    "US2012077349A1",
    "US2012080756A1",
    "US2012090704A1",
    "US2012098107A1",
    "US2012100464A1",
    "US2012103264A1",
    "US2012103939A1",
    "US2012107607A1",
    "US2012108039A1",
    "US2012114877A1",
    "US2012115250A1",
    "US2012115257A1",
    "US2012119337A1",
    "US2012121823A1",
    "US2012122275A1",
    "US2012122302A1",
    "US2012128897A1",
    "US2012135145A1",
    "US2012149213A1",
    "US2012156108A1",
    "US2012156890A1",
    "US2012160172A1",
    "US2012161405A1",
    "US2012164327A1",
    "US2012164837A1",
    "US2012164842A1",
    "US2012170170A1",
    "US2012171391A1",
    "US2012171874A1",
    "US2012175751A1",
    "US2012183689A1",
    "US2012187083A1",
    "US2012187305A1",
    "US2012190178A1",
    "US2012190185A1",
    "US2012196048A1",
    "US2012196450A1",
    "US2012207456A1",
    "US2012212121A1",
    "US2012214318A1",
    "US2012216743A1",
    "US2012219824A1",
    "US2012220139A1",
    "US2012225561A1",
    "US2012231771A1",
    "US2012238074A1",
    "US2012240858A1",
    "US2012241411A1",
    "US2012252229A1",
    "US2012263876A1",
    "US2012264051A1",
    "US2012270339A1",
    "US2012270393A1",
    "US2012289053A1",
    "US2012289057A1",
    "US2012295427A1",
    "US2012304935A1",
    "US2012305026A1",
    "US2012305196A1",
    "US2012305987A1",
    "US2012310440A1",
    "US2012315113A1",
    "US2012318334A1",
    "US2012321786A1",
    "US2012322252A1",
    "US2012325148A1",
    "US2012328780A1",
    "US2013005122A1",
    "US2013011983A1",
    "US2013014697A1",
    "US2013014896A1",
    "US2013019944A1",
    "US2013019945A1",
    "US2013020246A1",
    "US2013023129A1",
    "US2013025786A1",
    "US2013026451A1",
    "US2013037858A1",
    "US2013037886A1",
    "US2013048606A1",
    "US2013052585A1",
    "US2013061755A1",
    "US2013064973A1",
    "US2013065189A1",
    "US2013068727A1",
    "US2013068970A1",
    "US2013078392A1",
    "US2013081702A1",
    "US2013082274A1",
    "US2013084156A1",
    "US2013084714A1",
    "US2013089716A1",
    "US2013095664A1",
    "US2013095973A1",
    "US2013104988A1",
    "US2013104992A1",
    "US2013115383A1",
    "US2013115763A1",
    "US2013115768A1",
    "US2013122712A1",
    "US2013126515A1",
    "US2013129577A1",
    "US2013134148A1",
    "US2013143401A1",
    "US2013157409A1",
    "US2013160709A1",
    "US2013161629A1",
    "US2013168354A1",
    "US2013171818A1",
    "US2013175596A1",
    "US2013180448A1",
    "US2013183814A1",
    "US2013189854A1",
    "US2013203266A1",
    "US2013209940A1",
    "US2013210241A1",
    "US2013214232A1",
    "US2013217239A1",
    "US2013217240A1",
    "US2013217241A1",
    "US2013217243A1",
    "US2013224964A1",
    "US2013230814A1",
    "US2013256265A1",
    "US2013256838A1",
    "US2013256962A1",
    "US2013264659A1",
    "US2013269612A1",
    "US2013270676A1",
    "US2013276978A1",
    "US2013285155A1",
    "US2013287526A1",
    "US2013288480A1",
    "US2013288485A1",
    "US2013292047A1",
    "US2013292676A1",
    "US2013292807A1",
    "US2013295779A1",
    "US2013302999A1",
    "US2013313656A1",
    "US2013319290A1",
    "US2013320429A1",
    "US2013323435A1",
    "US2013330165A1",
    "US2013330911A1",
    "US2013330933A1",
    "US2013333619A1",
    "US2013337583A1",
    "US2013337653A1",
    "US2013340619A1",
    "US2013344248A1",
    "US2014000843A1",
    "US2014001520A1",
    "US2014014642A1",
    "US2014014644A1",
    "US2014015186A1",
    "US2014020619A1",
    "US2014023794A1",
    "US2014027884A1",
    "US2014033978A1",
    "US2014036274A1",
    "US2014047705A1",
    "US2014048765A1",
    "US2014056679A1",
    "US2014056770A1",
    "US2014057454A1",
    "US2014058179A1",
    "US2014060147A1",
    "US2014061770A1",
    "US2014062304A1",
    "US2014065841A1",
    "US2014067110A1",
    "US2014073143A1",
    "US2014076861A1",
    "US2014077240A1",
    "US2014084341A1",
    "US2014087544A1",
    "US2014094027A1",
    "US2014096716A1",
    "US2014097468A1",
    "US2014099798A1",
    "US2014103145A1",
    "US2014106574A1",
    "US2014110798A1",
    "US2014113457A1",
    "US2014116335A1",
    "US2014120487A1",
    "US2014120723A1",
    "US2014120738A1",
    "US2014127907A1",
    "US2014138779A1",
    "US2014141625A1",
    "US2014144500A1",
    "US2014158786A1",
    "US2014159170A1",
    "US2014167187A1",
    "US2014174354A1",
    "US2014175054A1",
    "US2014182053A1",
    "US2014191389A1",
    "US2014193983A1",
    "US2014202386A1",
    "US2014202388A1",
    "US2014209976A1",
    "US2014217065A1",
    "US2014220247A1",
    "US2014225065A1",
    "US2014227072A1",
    "US2014227861A1",
    "US2014227881A1",
    "US2014234550A1",
    "US2014251953A1",
    "US2014251954A1",
    "US2014252134A1",
    "US2014252479A1",
    "US2014260684A1",
    "US2014264902A1",
    "US2014272194A1",
    "US2014273428A1",
    "US2014273477A1",
    "US2014273510A1",
    "US2014273528A1",
    "US2014273530A1",
    "US2014273531A1",
    "US2014283747A1",
    "US2014346142A1",
    "US2014346650A1",
    "US2014349033A1",
    "US2014363980A1",
    "US2014363983A1",
    "US2014363985A1",
    "US2014367043A1",
    "US2014367642A1",
    "US2014377960A1",
    "US2015004316A1",
    "US2015004317A1",
    "US2015007770A1",
    "US2015010381A1",
    "US2015014632A1",
    "US2015014823A1",
    "US2015017794A1",
    "US2015021599A1",
    "US2015024609A1",
    "US2015041431A1",
    "US2015048485A1",
    "US2015056815A1",
    "US2015072509A1",
    "US2015078874A1",
    "US2015079311A1",
    "US2015086316A1",
    "US2015087154A1",
    "US2015091057A1",
    "US2015096973A1",
    "US2015099065A1",
    "US2015099072A1",
    "US2015099342A1",
    "US2015102466A1",
    "US2015111374A1",
    "US2015111395A1",
    "US2015122180A1",
    "US2015132212A1",
    "US2015140210A1",
    "US2015147483A1",
    "US2015147488A1",
    "US2015147877A1",
    "US2015162168A1",
    "US2015162185A1",
    "US2015162214A1",
    "US2015167159A1",
    "US2015170914A1",
    "US2015170947A1",
    "US2015170954A1",
    "US2015171177A1",
    "US2015174768A1",
    "US2015179501A1",
    "US2015179564A1",
    "US2015184291A1",
    "US2015187559A1",
    "US2015187568A1",
    "US2015217330A1",
    "US2015217456A1",
    "US2015218695A1",
    "US2015225850A1",
    "US2015228572A1",
    "US2015240359A1",
    "US2015243542A1",
    "US2015243545A1",
    "US2015243658A1",
    "US2015255385A1",
    "US2015259790A1",
    "US2015263033A1",
    "US2015267295A1",
    "US2015267297A1",
    "US2015267298A1",
    "US2015267299A1",
    "US2015267301A1",
    "US2015270146A1",
    "US2015279681A1",
    "US2015279708A1",
    "US2015284848A1",
    "US2015287626A1",
    "US2015287710A1",
    "US2015292088A1",
    "US2015299848A1",
    "US2015303056A1",
    "US2015308586A1",
    "US2015315704A1",
    "US2015340247A1",
    "US2015340500A1",
    "US2015343741A1",
    "US2015348755A1",
    "US2015361553A1",
    "US2015364371A1",
    "US2015367253A1",
    "US2015376211A1",
    "US2015376785A1",
    "US2015380296A1",
    "US2016013022A1",
    "US2016013024A1",
    "US2016020092A1",
    "US2016024656A1",
    "US2016035566A1",
    "US2016051964A1",
    "US2016056074A1",
    "US2016079054A1",
    "US2016097123A1",
    "US2016099150A1",
    "US2016102214A1",
    "US2016111272A1",
    "US2016111438A1",
    "US2016115590A1",
    "US2016133307A1",
    "US2016133628A1",
    "US2016141172A1",
    "US2016145738A1",
    "US2016148811A1",
    "US2016148821A1",
    "US2016155629A1",
    "US2016163556A1",
    "US2016163561A1",
    "US2016168699A1",
    "US2016181128A1",
    "US2016181368A1",
    "US2016190137A1",
    "US2016211135A1",
    "US2016211147A1",
    "US2016217857A1",
    "US2016225607A1",
    "US2016245704A1",
    "US2016256187A1",
    "US2016268102A1",
    "US2016268107A1",
    "US2016276148A1",
    "US2016284542A1",
    "US2016289828A1",
    "US2016293398A1",
    "US2016307766A1",
    "US2016312360A1",
    "US2016314964A1",
    "US2016334709A1",
    "US2016358772A1",
    "US2016362813A1",
    "US2016365280A1",
    "US2016372365A1",
    "US2016372744A1",
    "US2016376700A1",
    "US2016376704A1",
    "US2016379851A1",
    "US2016381732A1",
    "US2017011889A1",
    "US2017011950A1",
    "US2017018477A1",
    "US2017025280A1",
    "US2017029945A1",
    "US2017033004A1",
    "US2017037513A1",
    "US2017040164A1",
    "US2017040206A1",
    "US2017047446A1",
    "US2017051408A1",
    "US2017062204A1",
    "US2017062209A1",
    "US2017062258A1",
    "US2017091320A1",
    "US2017092469A1",
    "US2017092531A1",
    "US2017092847A1",
    "US2017100742A1",
    "US2017103907A1",
    "US2017107621A1",
    "US2017110313A1",
    "US2017114464A1",
    "US2017117141A1",
    "US2017117202A1",
    "US2017117203A1",
    "US2017117222A1",
    "US2017130332A1",
    "US2017136578A1",
    "US2017154757A1",
    "US2017173696A1",
    "US2017186754A1",
    "US2017191164A1",
    "US2017196562A1",
    "US2017216762A1",
    "US2017232457A1",
    "US2017243734A1",
    "US2017250068A1",
    "US2017250075A1",
    "US2017256429A1",
    "US2017260649A1",
    "US2017263437A1",
    "US2017267527A1",
    "US2017267531A1",
    "US2017271256A1",
    "US2017278707A1",
    "US2017287681A1",
    "US2017294318A1",
    "US2017306478A1",
    "US2017306479A1",
    "US2017306480A1",
    "US2017316933A1",
    "US2017316940A1",
    "US2017317194A1",
    "US2017338192A1",
    "US2017342559A1",
    "US2017343896A1",
    "US2017372884A1",
    "US2018010247A1",
    "US2018025890A1",
    "US2018025939A1",
    "US2018033616A1",
    "US2018033625A1",
    "US2018033645A1",
    "US2018033674A1",
    "US2018033679A1",
    "US2018040746A1",
    "US2018047749A1",
    "US2018057937A1",
    "US2018061851A1",
    "US2018069019A1",
    "US2018076021A1",
    "US2018087152A1",
    "US2018087154A1",
    "US2018087156A1",
    "US2018102276A1",
    "US2018105930A1",
    "US2018108587A1",
    "US2018114680A1",
    "US2018119283A1",
    "US2018122642A1",
    "US2018122709A1",
    "US2018122959A1",
    "US2018127876A1",
    "US2018130652A1",
    "US2018130701A1",
    "US2018135173A1",
    "US2018135179A1",
    "US2018142353A1",
    "US2018142357A1",
    "US2018151346A1",
    "US2018151358A1",
    "US2018158688A1",
    "US2018166258A1",
    "US2018166315A1",
    "US2018171475A1",
    "US2018171477A1",
    "US2018174826A1",
    "US2018182613A1",
    "US2018182618A1",
    "US2018189923A1",
    "US2018195174A1",
    "US2018223429A1",
    "US2018233372A1",
    "US2059480A",
    "US2161626A",
    "US2266416A",
    "US2280778A",
    "US2410420A",
    "US2563931A",
    "US2660061A",
    "US2745640A",
    "US2990045A",
    "US3038951A",
    "US3089507A",
    "US3094396A",
    "US3232437A",
    "US3263502A",
    "US3410349A",
    "US3588192A",
    "US3647387A",
    "US3647716A",
    "US3713899A",
    "US3718429A",
    "US3833492A",
    "US3854443A",
    "US3862397A",
    "US3867205A",
    "US3885504A",
    "US3887790A",
    "US3904371A",
    "US3913058A",
    "US3913617A",
    "US3947685A",
    "US3960559A",
    "US4054071A",
    "US4058430A",
    "US4093491A",
    "US4126027A",
    "US4134425A",
    "US4145699A",
    "US4164959A",
    "US4176630A",
    "US4181330A",
    "US4194536A",
    "US4217463A",
    "US4234449A",
    "US4322592A",
    "US4333735A",
    "US4355912A",
    "US4389973A",
    "US4393013A",
    "US4401507A",
    "US4414492A",
    "US4436674A",
    "US4444990A",
    "US4454370A",
    "US4455193A",
    "US4466766A",
    "US4479831A",
    "US4499354A",
    "US4512113A",
    "US4527005A",
    "US4537001A",
    "US4548688A",
    "US4570328A",
    "US4575636A",
    "US4578560A",
    "US4579378A",
    "US4579623A",
    "US4590326A",
    "US4611966A",
    "US4620998A",
    "US4653541A",
    "US4654226A",
    "US4664769A",
    "US4681134A",
    "US4718637A",
    "US4721533A",
    "US4722298A",
    "US4724272A",
    "US4735259A",
    "US4749416A",
    "US4753192A",
    "US4756794A",
    "US4771015A",
    "US4780169A",
    "US4789294A",
    "US4821674A",
    "US4827430A",
    "US4830515A",
    "US4837113A",
    "US4837185A",
    "US4854263A",
    "US4854263B1",
    "US4854266A",
    "US4857137A",
    "US4857382A",
    "US4882199A",
    "US4916091A",
    "US4934831A",
    "US4949848A",
    "US4976996A",
    "US4978567A",
    "US4984904A",
    "US4985114A",
    "US4986215A",
    "US4987856A",
    "US4989992A",
    "US4991614A",
    "US5013691A",
    "US5027746A",
    "US5028366A",
    "US5057436A",
    "US5060322A",
    "US5061083A",
    "US5062386A",
    "US5065698A",
    "US5071258A",
    "US5074017A",
    "US5098638A",
    "US5098865A",
    "US5104514A",
    "US5108192A",
    "US5116018A",
    "US5119760A",
    "US5130003A",
    "US5137286A",
    "US5154301A",
    "US5158128A",
    "US5167716A",
    "US5176451A",
    "US5178682A",
    "US5181779A",
    "US5183511A",
    "US5192717A",
    "US5194401A",
    "US5199603A",
    "US5213650A",
    "US5221556A",
    "US5225366A",
    "US5226383A",
    "US5228114A",
    "US5242539A",
    "US5243195A",
    "US5243202A",
    "US5246218A",
    "US5246500A",
    "US5259881A",
    "US5266526A",
    "US5271967A",
    "US5278494A",
    "US5284519A",
    "US5288684A",
    "US5294778A",
    "US5306666A",
    "US5306946A",
    "US5310456A",
    "US5314570A",
    "US5315092A",
    "US5326427A",
    "US5336327A",
    "US5354580A",
    "US5356478A",
    "US5356672A",
    "US5360269A",
    "US5364667A",
    "US5374315A",
    "US5380367A",
    "US5382311A",
    "US5388945A",
    "US5404082A",
    "US5407449A",
    "US5413813A",
    "US5414221A",
    "US5415753A",
    "US5421893A",
    "US5422139A",
    "US5423942A",
    "US5430011A",
    "US5444217A",
    "US5453124A",
    "US5494494A",
    "US5496408A",
    "US5504042A",
    "US5514439A",
    "US5518549A",
    "US5523616A",
    "US5527111A",
    "US5527417A",
    "US5531835A",
    "US5540898A",
    "US5558717A",
    "US5559046A",
    "US5574247A",
    "US5576629A",
    "US5577331A",
    "US5583736A",
    "US5589002A",
    "US5589110A",
    "US5595606A",
    "US5601641A",
    "US5604410A",
    "US5616264A",
    "US5616947A",
    "US5621982A",
    "US5632919A",
    "US5656093A",
    "US5663899A",
    "US5665608A",
    "US5679215A",
    "US5681779A",
    "US5683517A",
    "US5695567A",
    "US5697706A",
    "US5700729A",
    "US5708825A",
    "US5711811A",
    "US5716133A",
    "US5718574A",
    "US5724748A",
    "US5728223A",
    "US5730801A",
    "US5732744A",
    "US5736314A",
    "US5753835A",
    "US5761328A",
    "US5777838A",
    "US5779203A",
    "US5781693A",
    "US5782979A",
    "US5791782A",
    "US5792272A",
    "US5796074A",
    "US5801104A",
    "US5806980A",
    "US5813851A",
    "US5819092A",
    "US5819434A",
    "US5827435A",
    "US5827757A",
    "US5836483A",
    "US5837058A",
    "US5837320A",
    "US5844683A",
    "US5846332A",
    "US5851294A",
    "US5852879A",
    "US5853484A",
    "US5855680A",
    "US5855681A",
    "US5857777A",
    "US5863123A",
    "US5865205A",
    "US5873942A",
    "US5877095A",
    "US5879128A",
    "US5884640A",
    "US5908672A",
    "US5916365A",
    "US5920798A",
    "US5937323A",
    "US5947718A",
    "US5954375A",
    "US5961775A",
    "US5968275A",
    "US5970621A",
    "US5975492A",
    "US5979506A",
    "US5982931A",
    "US5984391A",
    "US5987480A",
    "US5997588A",
    "US5997768A",
    "US5998870A",
    "US6001267A",
    "US6013553A",
    "US6013920A",
    "US6015465A",
    "US6017779A",
    "US6017818A",
    "US6024799A",
    "US6035101A",
    "US6042652A",
    "US6044860A",
    "US6045260A",
    "US6048154A",
    "US6050506A",
    "US6054678A",
    "US6060691A",
    "US6060721A",
    "US6068441A",
    "US6072163A",
    "US6073973A",
    "US6074443A",
    "US6083321A",
    "US6086677A",
    "US6091062A",
    "US6093252A",
    "US6093253A",
    "US6096267A",
    "US6099302A",
    "US6102565A",
    "US6104011A",
    "US6104401A",
    "US6106678A",
    "US6119710A",
    "US6121061A",
    "US6121158A",
    "US6122036A",
    "US6124600A",
    "US6125789A",
    "US6126848A",
    "US6129044A",
    "US6129546A",
    "US6134807A",
    "US6137240A",
    "US6140252A",
    "US6148761A",
    "US6158941A",
    "US6160244A",
    "US6161500A",
    "US6162323A",
    "US6174809B1",
    "US6178918B1",
    "US6180979B1",
    "US6187672B1",
    "US6187691B1",
    "US6190634B1",
    "US6191399B1",
    "US6194037B1",
    "US6201999B1",
    "US6203613B1",
    "US6207932B1",
    "US6212789B1",
    "US6214122B1",
    "US6217658B1",
    "US6218288B1",
    "US6225020B1",
    "US6235858B1",
    "US6242359B1",
    "US6243654B1",
    "US6245665B1",
    "US6250250B1",
    "US6257758B1",
    "US6264467B1",
    "US6271148B1",
    "US6274878B1",
    "US6281098B1",
    "US6281141B1",
    "US6284050B1",
    "US6287965B1",
    "US6293700B1",
    "US6296909B1",
    "US6299133B2",
    "US6302964B1",
    "US6303523B2",
    "US6305898B1",
    "US6311016B1",
    "US6312525B1",
    "US6315512B1",
    "US6316162B1",
    "US6325858B1",
    "US6326597B1",
    "US6329297B1",
    "US6342427B1",
    "US6344084B1",
    "US6344232B1",
    "US6347636B1",
    "US6350391B1",
    "US6352945B1",
    "US6367410B1",
    "US6368773B1",
    "US6368987B1",
    "US6370796B1",
    "US6372583B1",
    "US6374831B1",
    "US6375312B1",
    "US6375750B1",
    "US6383566B1",
    "US6383955B1",
    "US6387207B1",
    "US6391803B1",
    "US6395650B1",
    "US6398184B1",
    "US6410459B2",
    "US6413321B1",
    "US6413583B1",
    "US6420279B1",
    "US6432849B1",
    "US6435798B1",
    "US6435865B1",
    "US6436819B1",
    "US6437444B2",
    "US6438502B1",
    "US6441350B1",
    "US6445574B1",
    "US6446573B2",
    "US6447232B1",
    "US6447651B1",
    "US6448192B1",
    "US6450757B1",
    "US6451713B1",
    "US6454860B2",
    "US6455225B1",
    "US6455445B2",
    "US6461435B1",
    "US6468924B2",
    "US6471779B1",
    "US6472266B1",
    "US6475276B1",
    "US6475930B1",
    "US6478872B1",
    "US6482331B2",
    "US6482663B1",
    "US6483989B1",
    "US6494065B2",
    "US6494998B1",
    "US6496819B1",
    "US6499533B2",
    "US6503079B2",
    "US6503562B1",
    "US6503826B1",
    "US6506253B2",
    "US6507410B1",
    "US6511539B1",
    "US6514313B1",
    "US6514666B1",
    "US6521295B1",
    "US6521547B1",
    "US6528430B2",
    "US6528767B2",
    "US6531193B2",
    "US6531412B2",
    "US6534133B1",
    "US6534395B2",
    "US6536950B1",
    "US6544906B2",
    "US6552209B1",
    "US6558755B2",
    "US6559026B1",
    "US6566278B1",
    "US6569239B2",
    "US6569971B2",
    "US6573030B1",
    "US6574644B2",
    "US6576062B2",
    "US6576064B2",
    "US6576300B1",
    "US6576564B2",
    "US6578589B1",
    "US6579833B1",
    "US6580050B1",
    "US6583048B2",
    "US6589707B2",
    "US6589868B2",
    "US6590251B2",
    "US6594550B1",
    "US6596653B2",
    "US6598559B1",
    "US6607868B2",
    "US6607948B1",
    "US6608745B2",
    "US6620251B2",
    "US6624064B1",
    "US6627268B1",
    "US6627503B2",
    "US6632478B2",
    "US6633364B2",
    "US6635117B1",
    "US6638839B2",
    "US6645304B2",
    "US6648974B1",
    "US6649921B1",
    "US6652924B2",
    "US6656281B1",
    "US6660662B2",
    "US6662817B2",
    "US6673196B1",
    "US6676290B1",
    "US6682971B2",
    "US6682973B1",
    "US6684659B1",
    "US6688784B1",
    "US6689220B1",
    "US6692575B1",
    "US6692576B2",
    "US6699003B2",
    "US6699399B1",
    "US6709989B2",
    "US6710364B2",
    "US6710857B2",
    "US6713824B1",
    "US6716571B2",
    "US6720260B1",
    "US6722837B2",
    "US6723642B1",
    "US6730614B1",
    "US6732006B2",
    "US6734090B2",
    "US6740853B1",
    "US6743475B2",
    "US6743738B2",
    "US6745095B1",
    "US6753507B2",
    "US6755221B2",
    "US6756085B2",
    "US6756293B2",
    "US6756318B2",
    "US6759098B2",
    "US6760981B2",
    "US6784108B1",
    "US6811960B2",
    "US6815350B2",
    "US6820570B2",
    "US6821910B2",
    "US6824665B2",
    "US6825134B2",
    "US6828235B2",
    "US6831004B2",
    "US6835039B2",
    "US6846146B2",
    "US6846515B2",
    "US6846742B2",
    "US6847014B1",
    "US6858524B2",
    "US6858547B2",
    "US6863019B2",
    "US6863281B2",
    "US6864041B2",
    "US6872258B2",
    "US6872259B2",
    "US6874247B1",
    "US6874480B1",
    "US6875677B1",
    "US6876017B2",
    "US6878402B2",
    "US6884066B2",
    "US6884295B2",
    "US6884319B2",
    "US6889211B1",
    "US6889864B2",
    "US6895158B2",
    "US6899507B2",
    "US6909839B2",
    "US6911092B2",
    "US6913152B2",
    "US6913796B2",
    "US6917755B2",
    "US6924078B2",
    "US6929700B2",
    "US6930041B2",
    "US6930059B2",
    "US6935269B2",
    "US6939817B2",
    "US6942753B2",
    "US6951587B1",
    "US6953609B2",
    "US6955836B2",
    "US6972055B2",
    "US6972478B1",
    "US6974781B2",
    "US6975921B2",
    "US6976822B2",
    "US6981832B2",
    "US6982046B2",
    "US6984595B1",
    "US6985788B2",
    "US6987155B2",
    "US6990430B2",
    "US7005227B2",
    "US7005391B2",
    "US7010580B1",
    "US7017514B1",
    "US7018941B2",
    "US7021881B2",
    "US7036453B2",
    "US7041609B2",
    "US7045430B2",
    "US7049247B2",
    "US7053009B2",
    "US7055875B2",
    "US7062161B2",
    "US7070178B2",
    "US7071051B1",
    "US7073834B2",
    "US7080545B2",
    "US7084060B1",
    "US7084079B2",
    "US7085623B2",
    "US7088003B2",
    "US7090394B2",
    "US7092287B2",
    "US7098149B2",
    "US7101763B1",
    "US7109098B1",
    "US7109114B2",
    "US7111232B1",
    "US7115838B2",
    "US7122085B2",
    "US7122222B2",
    "US7129165B2",
    "US7132360B2",
    "US7135421B2",
    "US7143897B1",
    "US7147766B2",
    "US7153542B2",
    "US7156380B2",
    "US7163393B2",
    "US7163721B2",
    "US7163900B2",
    "US7168852B2",
    "US7172497B2",
    "US7186648B1",
    "US7192824B2",
    "US7192892B2",
    "US7195693B2",
    "US7201943B2",
    "US7204887B2",
    "US7205246B2",
    "US7205247B2",
    "US7207763B2",
    "US7208389B1",
    "US7208413B2",
    "US7210925B2",
    "US7211524B2",
    "US7211525B1",
    "US7214630B1",
    "US7223014B2",
    "US7234476B2",
    "US7235137B2",
    "US7235482B2",
    "US7235501B2",
    "US7238596B2",
    "US7238616B2",
    "US7238653B2",
    "US7265061B1",
    "US7274867B2",
    "US7279256B2",
    "US7290813B2",
    "US7294581B2",
    "US7296460B2",
    "US7297641B2",
    "US7298009B2",
    "US7307028B2",
    "US7307178B2",
    "US7312148B2",
    "US7312162B2",
    "US7312494B2",
    "US7320544B2",
    "US7323401B2",
    "US7326657B2",
    "US7327948B1",
    "US7329947B2",
    "US7335611B2",
    "US7351057B2",
    "US7354847B2",
    "US7354873B2",
    "US7356762B2",
    "US7357138B2",
    "US7361447B2",
    "US7376520B2",
    "US7379785B2",
    "US7381644B1",
    "US7387685B2",
    "US7393207B2",
    "US7393418B2",
    "US7393736B2",
    "US7393765B2",
    "US7396491B2",
    "US7399388B2",
    "US7399570B2",
    "US7402534B2",
    "US7405166B2",
    "US7405454B2",
    "US7410290B2",
    "US7410666B2",
    "US7411352B2",
    "US7414281B1",
    "US7422635B2",
    "US7422653B2",
    "US7422775B2",
    "US7429532B2",
    "US7431966B2",
    "US7432476B2",
    "US7437060B2",
    "US7442275B2",
    "US7467632B2",
    "US7475588B2",
    "US7476291B2",
    "US7479198B2",
    "US7482247B1",
    "US7482283B2",
    "US7489389B2",
    "US7494882B2",
    "US7497614B2",
    "US7498242B2",
    "US7501292B2",
    "US7501355B2",
    "US7503980B2",
    "US7514375B1",
    "US7541297B2",
    "US7547363B2",
    "US7547633B2",
    "US7550396B2",
    "US7561982B2",
    "US7563715B2",
    "US7566891B2",
    "US7575968B2",
    "US7579285B2",
    "US7579785B2",
    "US7582555B1",
    "US7582575B2",
    "US7589003B2",
    "US7589029B2",
    "US7591601B2",
    "US7598513B2",
    "US7601223B2",
    "US7601225B2",
    "US7601652B2",
    "US7611751B2",
    "US7611980B2",
    "US7618226B2",
    "US7621672B2",
    "US7622369B1",
    "US7622378B2",
    "US7623940B2",
    "US7625820B1",
    "US7629277B2",
    "US7632549B2",
    "US7640142B2",
    "US7645341B2",
    "US7645484B2",
    "US7648927B2",
    "US7651269B2",
    "US7651583B2",
    "US7651955B2",
    "US7651959B2",
    "US7651961B2",
    "US7661299B2",
    "US7678197B2",
    "US7678715B2",
    "US7682454B2",
    "US7682657B2",
    "US7690881B2",
    "US7691205B2",
    "US7692171B2",
    "US7695808B2",
    "US7713874B2",
    "US7716993B2",
    "US7720560B2",
    "US7723648B2",
    "US7727864B2",
    "US7732343B2",
    "US7736437B2",
    "US7736528B2",
    "US7740705B2",
    "US7745346B2",
    "US7748760B2",
    "US7749563B2",
    "US7753584B2",
    "US7754621B2",
    "US7763869B2",
    "US7767262B2",
    "US7771796B2",
    "US7780440B2",
    "US7781352B2",
    "US7789559B2",
    "US7789965B2",
    "US7790633B1",
    "US7798096B2",
    "US7803722B2",
    "US7806587B2",
    "US7807566B2",
    "US7807578B2",
    "US7816278B2",
    "US7824492B2",
    "US7825040B1",
    "US7829460B2",
    "US7833353B2",
    "US7838084B2",
    "US7842518B2",
    "US7842622B1",
    "US7850449B2",
    "US7851019B2",
    "US7851232B2",
    "US7858519B2",
    "US7858533B2",
    "US7865070B2",
    "US7871198B2",
    "US7874726B2",
    "US7884918B2",
    "US7888233B1",
    "US7897215B1",
    "US7902582B2",
    "US7906174B1",
    "US7910288B2",
    "US7915139B1",
    "US7915667B2",
    "US7919416B2",
    "US7925378B2",
    "US7935940B1",
    "US7939447B2",
    "US7942969B2",
    "US7946762B2",
    "US7951262B2",
    "US7955516B2",
    "US7955650B2",
    "US7957708B2",
    "US7963736B2",
    "US7967913B2",
    "US7972980B2",
    "US7977256B2",
    "US7981751B2",
    "US7989736B2",
    "US7992318B2",
    "US7994721B2",
    "US7997795B2",
    "US7998875B2",
    "US8003174B2",
    "US8003919B2",
    "US8004198B2",
    "US8020315B2",
    "US8030129B2",
    "US8033771B1",
    "US8038835B2",
    "US8041197B2",
    "US8041450B2",
    "US8043972B1",
    "US8046193B2",
    "US8048783B2",
    "US8055378B2",
    "US8060252B2",
    "US8071451B2",
    "US8071452B2",
    "US8072578B2",
    "US8076230B2",
    "US8076237B2",
    "US8076250B1",
    "US8076251B2",
    "US8078310B2",
    "US8082946B2",
    "US8083853B2",
    "US8084104B2",
    "US8084372B2",
    "US8092604B2",
    "US8100583B2",
    "US8110099B2",
    "US8114734B2",
    "US8119466B2",
    "US8129290B2",
    "US8137462B2",
    "US8137465B1",
    "US8138104B2",
    "US8138676B2",
    "US8142862B2",
    "US8143174B2",
    "US8147242B2",
    "US8158512B2",
    "US8172947B2",
    "US8173554B2",
    "US8178436B2",
    "US8187679B2",
    "US8187951B1",
    "US8192901B2",
    "US8196234B2",
    "US8197915B2",
    "US8216380B2",
    "US8231799B2",
    "US8241991B2",
    "US8242028B1",
    "US8242031B2",
    "US8246900B2",
    "US8252114B2",
    "US8252659B2",
    "US8252691B2",
    "US8267633B2",
    "US8272516B2",
    "US8278176B2",
    "US8282769B2",
    "US8282847B2",
    "US8287648B2",
    "US8293016B2",
    "US8293642B2",
    "US8298951B1",
    "US8307472B1",
    "US8309173B2",
    "US8323413B2",
    "US8328939B2",
    "US8329599B2",
    "US8334219B2",
    "US8349083B2",
    "US8367528B2",
    "US8372204B2",
    "US8378464B2",
    "US8393091B2",
    "US8394466B2",
    "US8398773B2",
    "US8404499B2",
    "US8415258B2",
    "US8415259B2",
    "US8440259B2",
    "US8444120B2",
    "US8445075B2",
    "US8450191B2",
    "US8465811B2",
    "US8466411B2",
    "US8470187B2",
    "US8484846B2",
    "US8492170B2",
    "US8496377B2",
    "US8496756B2",
    "US8497213B2",
    "US8501599B2",
    "US8506162B2",
    "US8506713B2",
    "US8529701B2",
    "US8535767B1",
    "US8551892B2",
    "US8563443B2",
    "US8569184B2",
    "US8586484B2",
    "US8591659B1",
    "US8592005B2",
    "US8608885B2",
    "US8614047B2",
    "US8616765B2",
    "US8617411B2",
    "US8633115B2",
    "US8642488B2",
    "US8647722B2",
    "US8664127B2",
    "US8664627B1",
    "US8667654B2",
    "US8668957B2",
    "US8669185B2",
    "US8679958B2",
    "US8683943B2",
    "US8710580B2",
    "US8711338B2",
    "US8720965B2",
    "US8721791B2",
    "US8722510B2",
    "US8722546B2",
    "US8726837B2",
    "US8728832B2",
    "US8742668B2",
    "US8759223B2",
    "US8764085B2",
    "US8779502B2",
    "US8784950B2",
    "US8784951B2",
    "US8785215B2",
    "US8785311B2",
    "US8790743B1",
    "US8790749B2",
    "US8802201B2",
    "US8820809B2",
    "US8821640B2",
    "US8841182B1",
    "US8845806B2",
    "US8846502B2",
    "US8864202B1",
    "US8877655B2",
    "US8882923B2",
    "US8883270B2",
    "US8901016B2",
    "US8911553B2",
    "US8911826B2",
    "US8912101B2",
    "US8927906B2",
    "US8933375B2",
    "US8940646B1",
    "US8945305B2",
    "US8945306B2",
    "US8945339B2",
    "US8946830B2",
    "US8956971B2",
    "US8956983B2",
    "US8967608B2",
    "US8974868B2",
    "US8986456B2",
    "US8991214B2",
    "US8991887B2",
    "US8993054B2",
    "US8993457B1",
    "US8999102B2",
    "US9005539B2",
    "US9017481B1",
    "US9017933B2",
    "US9018093B2",
    "US9018111B2",
    "US9018567B2",
    "US9021985B2",
    "US9023737B2",
    "US9023738B2",
    "US9029253B2",
    "US9029272B1",
    "US9096931B2",
    "US9099505B2",
    "US9117657B2",
    "US9117866B2",
    "US9123510B2",
    "US9123577B2",
    "US9129897B2",
    "US9136108B2",
    "US9136180B2",
    "US9142393B2",
    "US9142437B2",
    "US9153441B2",
    "US9166012B2",
    "US9169975B2",
    "US9171714B2",
    "US9171716B2",
    "US9177784B2",
    "US9184047B2",
    "US9190263B2",
    "US9190264B2",
    "US9196483B1",
    "US9202727B2",
    "US9214333B1",
    "US9228259B2",
    "US9240412B2",
    "US9245742B2",
    "US9252024B2",
    "US9257274B2",
    "US9267850B2",
    "US9281277B2",
    "US9284642B2",
    "US9297705B2",
    "US9299557B2",
    "US9299595B2",
    "US9305836B1",
    "US9312155B2",
    "US9315897B2",
    "US9324811B2",
    "US9324846B1",
    "US9341296B2",
    "US9343297B1",
    "US9343308B2",
    "US9343343B2",
    "US9343350B2",
    "US9349620B2",
    "US9353441B2",
    "US9365924B2",
    "US9368352B2",
    "US9370863B2",
    "US9384987B2",
    "US9390909B2",
    "US9394608B2",
    "US9396934B2",
    "US9396956B1",
    "US9404587B2",
    "US9412564B2",
    "US9412582B2",
    "US9443725B2",
    "US9447498B2",
    "US9449793B2",
    "US9455138B1",
    "US9464352B2",
    "US9478414B2",
    "US9478415B2",
    "US9484191B2",
    "US9514927B2",
    "US9514932B2",
    "US9543180B2",
    "US9556516B2",
    "US9558931B2",
    "US9564314B2",
    "US9574268B1",
    "US9589770B2",
    "US9605342B2",
    "US9605343B2",
    "US9607837B1",
    "US9613801B2",
    "US9627221B1",
    "US9640416B2",
    "US9640448B2",
    "US9647114B2",
    "US9657845B2",
    "US9659799B2",
    "US9663857B2",
    "US9685320B2",
    "US9691771B2",
    "US9698031B2",
    "US9708707B2",
    "US9708708B2",
    "US9711345B2",
    "US9735024B2",
    "US9741559B2",
    "US9748145B1",
    "US9754779B1",
    "US9754818B2",
    "US9759489B2",
    "US9790595B2",
    "US9793115B2",
    "US9793135B1",
    "US9793148B2",
    "US9808246B2",
    "US9812319B1",
    "US9812320B1",
    "US9859151B1",
    "US9887082B1",
    "US9890456B2",
    "US9891521B2",
    "US9892908B2",
    "US9892913B2",
    "US9899291B2",
    "US9899405B2",
    "US9905420B2",
    "US9909214B2",
    "US9909492B2",
    "US9911676B2",
    "US9916980B1",
    "US9929011B2",
    "US9960072B2",
    "US9984869B1",
    "USD249341S",
    "USD288556S",
    "USD311126S",
    "USD327534S",
    "USD353452S",
    "USD380527S",
    "USD392855S",
    "USD409894S",
    "USD412270S",
    "USD419652S",
    "USD449873S",
    "USD451893S",
    "USD452220S",
    "USD455024S",
    "USD457609S",
    "USD461233S",
    "USD461882S",
    "USD486891S",
    "USD497977S",
    "USD505590S",
    "USD553104S",
    "USD557226S",
    "USD575713S",
    "USD576001S",
    "USD585968S",
    "USD590933S",
    "USD593969S",
    "USD600223S",
    "USD602575S",
    "USD606952S",
    "USD609652S",
    "USD609655S",
    "USD613829S",
    "USD614153S",
    "USD614267S",
    "USD614268S",
    "USD614593S",
    "USD629874S",
    "USD634329S",
    "USD634719S",
    "USD643055S",
    "USD651291S",
    "USD652896S",
    "USD653734S",
    "USD654884S",
    "USD655055S",
    "USD665055S",
    "USD676943S",
    "USD691974S",
    "USD695240S",
    "USD698904S",
    "USD702188S",
    "USD705745S",
    "USD705762S",
    "USD715410S",
    "USD716742S",
    "USD720838S",
    "USD723153S",
    "USD723330S",
    "USD724553S",
    "USD724701S",
    "USD725168S",
    "USD726365S",
    "USD726884S",
    "USD732145S",
    "USD732644S",
    "USD733261S",
    "USD733262S",
    "USD733843S",
    "USD734377S",
    "USD735836S",
    "USD739222S",
    "USD742202S",
    "USD743357S",
    "USD743513S",
    "USD753269S",
    "USD753629S",
    "USD770993S",
    "USD783351S",
    "USD785766S",
    "USD787458S",
    "USD789888S",
    "USD793352S",
    "USD793572S",
    "USD796458S",
    "USD802546S",
    "USD830981S",
    "WO2004008491A2",
    "WO2004008827A2",
    "WO2004010467A2",
    "WO2005112082A1",
    "WO2006054854A1",
    "WO2006056091A1",
    "WO2006078666A2",
    "WO2006080782A1",
    "WO2006101857A2",
    "WO2006114781A2",
    "WO2007027165A1",
    "WO2007117718A2",
    "WO2007140376A2",
    "WO2008045972A2",
    "WO2008091900A1",
    "WO2008121463A1",
    "WO2008147731A1",
    "WO2009028619A1",
    "WO2009099776A1",
    "WO2009154889A2",
    "WO2009154896A1",
    "WO2010039363A2",
    "WO2010077533A2",
    "WO2010100702A1",
    "WO2010118051A2",
    "WO2010129428A1",
    "WO2010129430A1",
    "WO2010129431A2",
    "WO2011019950A1",
    "WO2011149640A1",
    "WO2012077590A1",
    "WO2013078065A1",
    "WO2013078066A1",
    "WO2014107290A1",
    "WO2015107009A1",
    "WO2017108713A1",
    "WO2017108714A1",
    "WO2017212546A1",
    "WO2018008088A1",
    "WO2018020316A1",
    "WO2018020318A1",
    "WO2018020320A1",
    "WO2018020327A2",
    "WO2018109551A2",
    "WO2018109552A1",
    "WO2018109553A2",
    "WO2018109554A1",
    "WO9617107A1",
    "WO9703223A1",
    "WO9832893A2",
    "WO9923690A1"
  ]
}