Method for forming vertical spacers for spacer-defined patterning

{
  "publication_number": "US10290508B1",
  "country": "US",
  "kind": "B1",
  "title": "Method for forming vertical spacers for spacer-defined patterning",
  "abstract": "A method of forming vertical spacers for spacer-defined multiple patterning, includes: depositing a first conformal pattern-transfer film having a first film stress, and continuously depositing a second conformal pattern-transfer film having a second film stress on a template; dry-etching the template except for a core material and a vertical portion of the first and second pattern-transfer films to form vertical spacers; and dry-etching the core material, forming a vacant space between the vertical spacers, wherein by adjusting the difference in film stress between the first and second pattern-transfer films, the leaning angle of the spacers is adjusted.",
  "claims": [
    "1. A method of forming spacers for spacer-defined patterning in steps comprising (i) depositing a pattern-transfer film on a template having a surface patterned by a mandrel formed on an underlying layer, (ii) dry-etching the template whose entire upper surface is covered with the pattern-transfer film, and thereby selectively removing a top portion of the pattern-transfer film formed on a top of the mandrel and a horizontal portion of the pattern-transfer film formed on the underlying layer while leaving the mandrel as a core material and sidewall portions of the pattern-transfer film formed on sidewalls of the mandrel as spacers, and (iii) dry-etching the core material, forming a vacant space, whereby the template has a surface patterned by the spacers on the underlying layer, which spacers lean inwardly toward the vacant space at a first leaning angle which is defined as an angle of an inner face of each sidewall portion as measured with reference to a line vertical to a bottom of the vacant space wherein a leaning angle of zero represents completely vertical and a leaning angle of a positive value represents leaning inward, wherein the improvement comprises: in step (i), depositing, as the pattern-transfer film, a conformal pattern-transfer film having different film stresses in a depth direction wherein a lower half of the conformal pattern-transfer film has a first film stress and an upper half of the conformal pattern-transfer film has a second film stress, wherein the first film stress is more compressive than the second film stress, whereby in step (iii), the spacers lean inwardly toward the vacant space at a second leaning angle which is less than the first leaning angle, wherein: the conformal pattern-transfer film is constituted by a first layer and a second layer deposited on the first layer, wherein the first layer has a film stress which is more compressive than a film stress of the second layer, and the first layer has a thickness which is 25% to 75% of a total thickness of the first and second layers, the first layer has less resistance to dry etching than does the second layer, and a difference in resistance to dry etching between the first layer and the second layer is such that in step (ii), a top of each spacer becomes substantially flat by inhibiting shoulder loss of the spacer by dry etching.",
    "2. The method according to claim 1, wherein the second leaning angle is in a range of approximately −1° to approximately 1°.",
    "3. The method according to claim 1, wherein the multiple layers are deposited by plasma-enhanced atomic layer deposition (PEALD).",
    "4. The method according to claim 1, wherein a difference between the film stress of the first layer and the film stress of the second layer is between approximately 150 MPa and approximately 800 MPa.",
    "5. The method according to claim 1, wherein the first and second layers are independently constituted by silicon oxide or silicon nitride.",
    "6. The method according to claim 5, wherein the first layer is constituted by silicon nitride and the second layer is silicon oxide.",
    "7. The method according to claim 5, wherein the first and second layers are constituted by silicon oxide.",
    "8. The method according to claim 1, wherein the first and second layers are constituted by different compositions.",
    "9. A method of forming spacers for spacer-defined patterning in steps comprising (i) depositing a pattern-transfer film on a template having a surface patterned by a mandrel formed on an underlying layer, (ii) dry-etching the template whose entire upper surface is covered with the pattern-transfer film, and thereby selectively removing a top portion of the pattern-transfer film formed on a top of the mandrel and a horizontal portion of the pattern-transfer film formed on the underlying layer while leaving the mandrel as a core material and sidewall portions of the pattern-transfer film formed on sidewalls of the mandrel as spacers, and (iii) dry-etching the core material, forming a vacant space, whereby the template has a surface patterned by the spacers on the underlying layer, which spacers lean inwardly toward the vacant space at a first leaning angle which is defined as an angle of an inner face of each sidewall portion as measured with reference to a line vertical to a bottom of the vacant space wherein a leaning angle of zero represents completely vertical and a leaning angle of a positive value represents leaning inward, wherein the improvement comprises: in step (i), depositing, as the pattern-transfer film, a conformal pattern-transfer film having different film stresses in a depth direction wherein a lower half of the conformal pattern-transfer film has a first film stress and an upper half of the conformal pattern-transfer film has a second film stress, wherein the first film stress is more compressive than the second film stress, whereby in step (iii), the spacers lean inwardly toward the vacant space at a second leaning angle which is less than the first leaning angle, wherein the conformal pattern-transfer film has film stress varying in the depth direction, wherein the film stress gradually increases in an outward direction.",
    "10. The method according to claim 9, wherein the conformal pattern-transfer film is constituted by multiple layers.",
    "11. The method according to claim 10, wherein the multiple layers are constituted by a first layer and a second layer deposited on the first layer, wherein the first layer has a film stress which is more compressive than a film stress of the second layer, and the first layer has a thickness which is 25% to 75% of a total thickness of the first and second layers.",
    "12. The method according to claim 10, wherein the multiple layers are constituted by a first layer and a second layer deposited on the first layer, wherein the first layer has a film stress which is more compressive than a film stress of the second layer, and the thickness of the first layer is equal to or greater than the thickness of the second layer.",
    "13. The method according to claim 11, wherein the first layer has less resistance to dry etching than does the second layer.",
    "14. A method of forming vertical spacers for spacer-defined multiple patterning, comprising: (i) providing a template having a surface patterned by a mandrel formed on an underlying layer in a reaction space; (ii) depositing a first conformal pattern-transfer film having a first film stress, and continuously depositing a second conformal pattern-transfer film having a second film stress on the entire patterned surface of the template, wherein the first and second film stresses are different; (iii) dry-etching the template whose entire upper surface is covered with the first and second pattern-transfer films, and thereby selectively removing a portion of the first and second pattern-transfer films formed on a top of the mandrel and a horizontal portion of the first and second pattern-transfer films while leaving the mandrel as a core material and a vertical portion of the first and second pattern-transfer films as vertical spacers; and (iv) dry-etching the core material, forming a vacant space between the vertical spacers, whereby the template has a surface patterned by the vertical spacers on the underlying layer, the method further comprises: (v) measuring a leaning angle of the vertical spacer, which is defined as an angle of an inner face of the vertical spacer facing the vacant space as measured with reference to a line vertical to a bottom of the vacant space wherein a leaning angle of zero represents completely vertical and a leaning angle of a positive value represents leaning inward, followed by judging whether the leaning angle is within a target range; (vi) conducting again steps (i) to (iv): (a) without changes to form final vertical spacers if the leaning angle is within the preset range; (b) with changes wherein, as the first conformal pattern-transfer film in step (ii), a conformal pattern-transfer film having higher compressive stress than the first film stress by a measurable degree is deposited, and/or, as the second conformal pattern-transfer film in step (ii), a conformal pattern-transfer film having higher tensile stress than the second film stress by a measurable degree is deposited, if the leaning angle is greater than the preset range; or (c) with changes wherein, as the first conformal pattern-transfer film in step (ii), a conformal pattern-transfer film having lower compressive stress than the first film stress by a measurable degree is deposited, and/or, as the second conformal pattern-transfer film in step (ii), a conformal pattern-transfer film having lower tensile stress than the second film stress by a measurable degree is deposited, if the leaning angle is smaller than the preset range; and (vii) repeating steps (v) and (vi) after increasing the measurable degree used in (b) or (c), if (b) or (c) in step (vi) is conducted, wherein the first conformal pattern-transfer film has a first resistance to dry etching, and the second conformal pattern-transfer film has a second resistance to dry etching; and step (v) further comprises judging whether a top of the vertical spacer is substantially flat, wherein if the top of the vertical spacer is not substantially flat; in step (vi), as the first conformal pattern-transfer film, a first conformal pattern-transfer film which has less resistance to dry etching than the first resistance to dry etching and also than the second conformal pattern-transfer film by a measurable degree is deposited, and/or, as the second conformal pattern-transfer film, a second conformal pattern-transfer film which has higher resistance to dry etching than the second resistance to dry etching and also than the first conformal pattern-transfer film by a measurable degree is deposited; and in step (vii), steps (v) and (vi) are repeated after increasing the measurable degree, until the top of the vertical spacer is substantially flat.",
    "15. A method of forming spacers for spacer-defined patterning in steps comprising (i) depositing a pattern-transfer film on a template having a surface patterned by a mandrel formed on an underlying layer, (ii) dry-etching the template whose entire upper surface is covered with the pattern-transfer film, and thereby selectively removing a top portion of the pattern-transfer film formed on a top of the mandrel and a horizontal portion of the pattern-transfer film formed on the underlying layer while leaving the mandrel as a core material and sidewall portions of the pattern-transfer film formed on sidewalls of the mandrel as spacers, and (iii) dry-etching the core material, forming a vacant space, whereby the template has a surface patterned by the spacers on the underlying layer, wherein a shoulder part of each spacer facing the vacant space, which shoulder part is an outer corner of a top of the spacer, is lost or etched, forming an inclined surface from an outer side to an inner side of the top of the spacer, wherein the improvement comprises: in step (i), depositing, as the pattern-transfer film, a conformal pattern-transfer film constituted by a two-layer film including a first layer and a second layer deposited on the first layer wherein the first layer has less resistance to dry etching than the does second layer, wherein a difference in resistance to dry etching between the first layer and the second layer is such that in step (iii), the top of each spacer becomes substantially flat by inhibiting shoulder loss of the spacer by dry etching.",
    "16. The method according to claim 15, wherein the first layer is constituted by silicon nitride, and the second layer is constituted by silicon oxide."
  ],
  "description_excerpt": "The present invention relates generally to a method for forming vertical spacers for spacer-defined patterning in semiconductor fabrication processes.\n\nPatterning processes using lithography technology are essential to semiconductor fabrication processes. However, lithography technology faces difficulties in pattern miniaturization due to the limited wavelength of a laser light used in lithography. One approach to realize pattern miniaturization using known patterning technology is SADP (Self Aligned Double Pattering) or SDDP (Spacer-Defined Double Patterning). FIG. 4 is a schematic representation of double patterning (steps (a) to (c)) according to a comparative example. In step (a), mandrels (photoresist) 101 are patterned as a core material on an underlying layer 102. In step (b), a film 103 is deposited to cover the exposed surfaces of the mandrels 101 and the exposed surface of the underlying surface 102 in their entirety. In step (c), by dry etching, the horizontal portions of the film 103 and the mandrels 101 are etched so as to form spacers 104. By using the above process, a pattern constituted by the spacers 104 in step (c) can have a pitch which is a half of that of the pattern of the photoresist 101 in step (a), i.e., double-dense pitched patterning can be accomplished. However, in the process, the spacers 104 (formed from the sidewall portions of the film 103) lean toward a vacant space 110 during and after the core-stripping step (c) as shown in FIG. 4. This leaning phenomenon makes it difficult for semiconductor manufacturers to continuously conduct subsequent integration processes precisely.",
  "cpc": [
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  "ipc": [
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  "assignees": [
    "ASM IP Holding BV"
  ],
  "inventors": [
    "Tomohiro Kubota",
    "Yoshio SUSA"
  ],
  "filing_date": "2017-12-05",
  "publication_date": "2019-05-14",
  "grant_date": "2019-05-14",
  "priority_date": "2017-12-05",
  "application_number": "US-201715832188-A",
  "family_id": "66439683",
  "cited_by_count": 417,
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