Method for passivating a surface of a semiconductor and related systems

{
  "publication_number": "US10410943B2",
  "country": "US",
  "kind": "B2",
  "title": "Method for passivating a surface of a semiconductor and related systems",
  "abstract": "A system and a method for passivating a surface of a semiconductor. The method includes providing the surface of the semiconductor to a reaction chamber of a reactor, exposing the surface of the semiconductor to a gas-phase metal containing precursor in the reaction chamber and exposing the surface of the semiconductor to a gas-phase chalcogenide containing precursor. The methods also include passivating the surface of the semiconductor using the gas-phase metal containing precursor and the gas-phase chalcogenide containing precursor to form a passivated surface. The system for passivating a surface of a semiconductor may include a reactor, a metal containing precursor source fluidly coupled to the reactor, and a chalcogenide containing precursor source fluidly couple to the reactor, wherein the metal containing precursor source provides a gas-phase metal containing precursor to a reaction chamber of the reactor, and wherein the chalcogenide containing precursor source provides a gas-phase chalcogenide containing precursor to a reaction chamber of the reactor.",
  "claims": [
    "1. A method of passivating a surface of a semiconductor, the method comprising: providing the surface of the semiconductor to a first reaction chamber of a reactor; exposing the surface of the semiconductor to a gas-phase metal containing precursor comprising at least one of trimethylaluminum (TMA), tetrakis(ethylmethylamido)hafnium (TEMAHf), tetrakis(ethylmethlamido)zirconium (TEMAZr), tetrakis(dimethlyamido)titanium (TDMATi), Lanthanum formamidinate (La(FAMD) 3), bis(cyclopentadienyl) Magnesium (Cp 2 Mg) and Tris(ethylcyclopentadienyl) Yttrium (Y(EtCp) 3 in the first reaction chamber; exposing the surface of the semiconductor to a gas-phase chalcogenide containing precursor in a second reaction chamber; and passivating the surface of the semiconductor using the gas-phase metal containing precursor and the gas-phase chalcogenide containing precursor to form a passivated semiconductor surface.",
    "2. The method of claim 1, wherein exposing the surface of the semiconductor to a gas-phase metal containing precursor in the first reaction chamber and exposing the surface of the semiconductor to the gas-phase chalcogenide containing precursor in the second reaction chamber take place without exposure of the semiconductor to ambient air.",
    "3. The method of claim 1, further comprising, selecting the semiconductor to comprise a high mobility semiconductor comprising at least one of silicon germanium, germanium or a III-V semiconductor material.",
    "4. The method of claim 1, further comprising selecting the gas-phase chalcogenide containing precursor to comprise at least one of pure hydrogen sulfide (H 2 S), hydrogen selenide (H 2 Se), hydrogen telluride (H 2 Te), or gas-phase chalcogenide mixed with H 2.",
    "5. The method of claim 1, wherein exposing the surface of the semiconductor to the gas-phase metal containing precursor is performed prior to exposing the surface of the semiconductor to the gas-phase chalcogenide containing precursor.",
    "6. The method of claim 1, wherein exposing the surface of the semiconductor to the gas-phase chalcogenide containing precursor is performed prior to exposing the surface of the semiconductor to the gas-phase metal containing precursor.",
    "7. The method of claim 1, further comprising purging excess precursor after exposing the semiconductor surface to least one of the gas-phase metal containing precursor and the gas-phase chalcogenide containing precursor.",
    "8. The method of claim 1, further comprising depositing a dielectric material on the passivated semiconductor surface.",
    "9. A semiconductor structure formed using the method of claim 8, wherein the structure exhibits a D it at midgap of less than about 1.5 e 12 (/eVcm 2).",
    "10. The method of claim 8, wherein the depositing of the dielectric material and the exposing of semiconductor surface to the gas-phase metal containing precursor and the gas-phase chalcogenide containing precursor are performed in the same reactor.",
    "11. The method of claim 8, wherein depositing a dielectric material on the passivated surface further comprises, depositing an aluminum oxide on the passivated surface.",
    "12. The method of claim 1 further comprising, cleaning the surface of the semiconductor prior to exposing the semiconductor surface to the gas-phase metal containing precursor and the gas-phase chalcogenide containing precursor.",
    "13. A system for passivating a surface of a semiconductor, the system comprising: a reactor; a metal containing precursor source comprising at least one of trimethylaluminum (TMA), tetrakis(ethylmethylamido)hafnium (TEMAHf), tetrakis(ethylmethlamido)zirconium (TEMAZr), tetrakis(dimethlyamido)titanium (TDMATi), Lanthanum formamidinate (La(FAMD) 3), bis(cyclopentadienyl) Magnesium (Cp 2 Mg) or Tris(ethylcyclopentadienyl) Yttrium (Y(E t Cp) 3 fluidly coupled to the reactor; and a chalcogenide containing precursor source fluidly coupled to the reactor; wherein the metal containing precursor source provides a gas-phase metal containing precursor to a first reaction chamber of the reactor; and wherein the chalcogenide containing precursor source provides a gas-phase chalcogenide containing precursor to a second reaction chamber of the reactor.",
    "14. The system of claim 13, wherein the reactor comprises a cluster tool.",
    "15. The system of claim 13, wherein the metal containing source fluidly coupled to the reactor is fluidly coupled to the first reaction chamber of the reactor and the chalcogenide containing precursor source fluidly coupled to the reactor is fluidly coupled to the second reaction chamber of the reactor.",
    "16. The system of claim 13, wherein the chalcogenide containing precursor comprises at least one of pure hydrogen sulfide (H 2 S), hydrogen selenide (H 2 Se) or hydrogen telluride (H 2 Te).",
    "17. The system of claim 13, further comprising a cleaning source fluidly coupled to the reactor.",
    "18. The system of claim 17 wherein the cleaning source is selected from the group consisting of hydrogen chloride (HCl), hydrogen fluoride (HF), ammonium hydroxide (NH 4 OH), hydrogen (H 2), and hydrogen plasma.",
    "19. The system of claim 13 wherein the reactor comprises an atomic layer deposition reaction chamber."
  ],
  "description_excerpt": "The present disclosure generally relates to methods for passivating a surface of a semiconductor and also to systems for passivating a surface of a semiconductor.\n\nHigh-mobility semiconductors, such as germanium, silicon germanium and compound semiconductors (e.g., III-V compound semiconductors) may be desirable to use in the fabrication of semiconductor devices because of their relatively high electron and/or hole mobility. Devices formed with high-mobility semiconductor materials may theoretically exhibit better performance, faster speeds, reduced power consumption, and have higher breakdown fields compared to similar devices formed with a lower-mobility semiconductor, such as silicon.\n\nHigh-mobility semiconductor material may be used, for example, to fabricate metal oxide field effect (MOSFET) devices. A typical MOSFET device includes a source region, a drain region, and a channel region, each formed of a semiconductor material. The MOSFET also includes a dielectric material (gate dielectric) and a conductive material (e.g., metal) overlying the channel region. The dielectric material and the conductive material may be formed by depositing the respective materials using vacuum or gas-phase deposition techniques, such as, chemical vapor deposition, plasma-enhanced chemical vapor deposition, atomic layer deposition, physical vapor deposition, or the like.",
  "cpc": [
    "H10W 74/137",
    "C23C 16/305",
    "C23C 16/45544",
    "C23C 16/45553",
    "H01L 21/02178",
    "H01L 21/02205",
    "H01L 21/02271",
    "H01L 21/02312",
    "H01L 21/306",
    "H01L 21/67017",
    "H01L 21/67155",
    "H01L 21/6719",
    "H01L 23/291",
    "H01L 23/3171",
    "H01L 29/66477",
    "H10D 30/021",
    "H10D 64/01354",
    "H10P 14/3436",
    "H10P 14/6334",
    "H10P 14/6512",
    "H10P 14/668",
    "H10P 14/69391",
    "H10P 50/00",
    "H10P 70/00",
    "H10P 72/0402",
    "H10P 72/0451",
    "H10P 72/0462",
    "H10W 74/43"
  ],
  "ipc": [
    "C23C 16/455",
    "H01L 23/29",
    "H01L 23/31",
    "H10P 72/00",
    "C23C 16/30"
  ],
  "assignees": [
    "ASM IP Holding BV"
  ],
  "inventors": [
    "Xiaoqiang Jiang",
    "Fu Tang",
    "Qi Xie",
    "Pauline Calka",
    "Sung-Hoon Jung",
    "Michael Eugene Givens"
  ],
  "filing_date": "2017-08-09",
  "publication_date": "2019-09-10",
  "grant_date": "2019-09-10",
  "priority_date": "2016-10-13",
  "application_number": "US-201715673278-A",
  "family_id": "61904707",
  "cited_by_count": 342,
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