MLchartDataset catalogue

Patents full text · MLC-0201

CPC subclass H10P

Generic processes or apparatus for the manufacture or treatment of devices covered by class H10

142 patents · page 2 of 2

Table 1. Patents
No.PublicationTitlePublishedAssignee
101US6938505B2Chamber wafer detection2005-09-06TAIWAN SEMICONDUCTOR MFG
102US2004241981A1Structure and method to fabricate ultra-thin si channel devices2004-12-02IBM
103US6780773B2Method of chemical mechanical polishing with high throughput and low dishing2004-08-24APPLIED MATERIALS INC
104US6683663B1Web fabrication of devices2004-01-27ALIEN TECHNOLOGY CORP
105US6664129B2Integrated circuits and methods for their fabrication2003-12-16TRI SI TECHNOLOGIES INC
106US6660700B2Formulations including a 1,3-dicarbonyl compound chelating agent and copper corrosion inhibiting agents for stripping residues from semiconductor substrates containing copper structures2003-12-09ADVANCED TECHNOLOGIES MATERIAL
107US6656017B2Method and apparatus for creating an open cell micro-environment for treating a substrate with an impingement spray2003-12-02
108US6654668B1Processing apparatus, processing system, distinguishing method, and detecting method2003-11-25TOKYO ELECTRON LTD
109US6592671B2Apparatus for clamping a planar substrate2003-07-15DELSYS PHARMACEUTICAL CORP
110US6576138B2Method for purifying semiconductor gases2003-06-10PRAXAIR TECHNOLOGY INC
111US6570253B1Multi-layer film for a thin film structure and a capacitor using the same2003-05-27SAMSUNG ELECTRONICS CO LTD
112US6568863B2Platform and optical module, method of manufacture thereof, and optical transmission device2003-05-27SEIKO EPSON CORP
113US6566204B1Use of mask shadowing and angled implantation in fabricating asymmetrical field-effect transistors2003-05-20NAT SEMICONDUCTOR CORP
114US6534395B2Method of forming graded thin films using alternating pulses of vapor phase reactants2003-03-18ASM MICROCHEMISTRY OY
115US6498107B1Interface control for film deposition by gas-cluster ion-beam processing2002-12-24EPION CORP
116US6436251B2Vault-shaped target and magnetron having both distributed and localized magnets2002-08-20APPLIED MATERIALS INC
117US6429037B1Self aligning method for forming a selective emitter and metallization in a solar cell2002-08-06UNISEARCH LTD
118US6424028B1Semiconductor devices configured to tolerate connection misalignment2002-07-23KONINKL PHILIPS ELECTRONICS NV
119US6410463B1Method for forming film with low dielectric constant on semiconductor substrate2002-06-25ASM JAPAN
120US6395334B1Multiple head dispensing method2002-05-28SPEEDLINE TECHNOLOGIES INC
121US6274878B1Wafer out-of-pocket detection method2001-08-14APPLIED MATERIALS INC
122US6274496B1Method for single chamber processing of PECVD-Ti and CVD-TiN films for integrated contact/barrier applications in IC manufacturing2001-08-14TOKYO ELECTRON LTD
123US6183563B1Apparatus for depositing thin films on semiconductor wafers2001-02-06IPS LTD
124US6158445ASemiconductor wafer cleaning method2000-12-12
125US6135860AFixture for mechanical grinding and inspection of failed or defective semiconductor devices2000-10-24SONY CORP
126US6123775AReaction chamber component having improved temperature uniformity2000-09-26LAM RES CORP
127US6113695ACoating unit2000-09-05TOKYO ELECTRON LTD
128US6043132AMethod for forming HSG silicon film of semiconductor device2000-03-28SAMSUNG ELECTRONICS CO LTD
129US5981399AMethod and apparatus for fabricating semiconductor devices1999-11-09HITACHI LTD
130US5981361AFabrication process of a semiconductor device including a dicing process of a semiconductor wafer1999-11-09FUJITSU LTD
131US5858819AFabrication method for a thin film semiconductor device, the thin film semiconductor device itself, liquid crystal display, and electronic device1999-01-12SEIKO EPSON CORP
132US5723028AElectrodeposition apparatus with virtual anode1998-03-03
133US5695817AMethod of forming a coating film1997-12-09TOKYO ELECTRON LTD
134US5665167APlasma treatment apparatus having a workpiece-side electrode grounding circuit1997-09-09TOKYO ELECTRON LTD
135US5584938AElectrostatic particle removal and characterization1996-12-17TEXAS INSTRUMENTS INC
136US5476810AManufacture of electronic devices comprising thin-film circuits using a metal foil as a temporary support1995-12-19PHILIPS CORP
137US5295296AMethod and apparatus for working a clad material1994-03-22CITIZEN WATCH CO LTD
138US4877757AMethod of sequential cleaning and passivating a GaAs substrate using remote oxygen plasma1989-10-31TEXAS INSTRUMENTS INC
139US4529353AWafer handling apparatus and method1985-07-16AT & T BELL LAB
140US4425076AProcess and apparatus for automatic positioning of a substrate on a worktable1984-01-10CII HONEYWELL BULL
141US3851899AMeans for sealing fittings and nozzle assemblies at extremely high fluid pressures1974-12-03FRANZ N
142US3670218AMonolithic heteroepitaxial microwave tunnel die1972-06-13NORTH AMERICAN ROCKWELL

142 records in this listing. Patents full text (MLC-0201). Request the full dataset.